Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: September, 2008
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Shipping brackets and kits will need to be supplied by the buyer.
[Chamber A]
Chemical : SST-A47 , 35 deg
Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?
Spin dry ,2500rpm
Chuck type : mechanical Chuck
[Chamber B]
Chemical : SST-A47 , 35 deg
Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?
Spin dry ,2500rpm
Chuck type : mechanical Chuck
[Chamber C]
Chemical : SST-A47 , 35 deg
Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?
Spin dry ,2500rpm
Chuck type : mechanical Chuck
[Chamber D]
Chemical : SST-A47 , 35 deg
Rinse(front/back) :DIW/ CO2 injection ,resistivity <1M?
Spin dry ,2500rpm
Chuck type : mechanical Chuck
Other options
Chemilcal filter for acid removal
Missing or damaged parts: Not reported. Inspection is recommended to confirm.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.