Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

KLA-Tencor Corp. eDR-5210

Asset ID: 210192

Print spec sheet

KLA-Tencor Corp.

eDR-5210

SEM - Defect Review (DR)

Metrology Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available



Inspect to confirm configuration and condition.


Equipment IDDFSEM-06
Date of AuditNov-07
Serial Number139742
Wafer Size (inches)12
Loading Configuration  FOUP
Number of Cassette/FOUP Positions2
Date of Last PM2017
Is System On-Line?No
CE Mark Certified?No
OEM Audit Available?No
Can Produce Wafers AS IS?No
Any Known Field Modifications?No
All Cables Present?YES
Main PlatformeDR5210 
Clean Room ManualsNo
Standard ManualsNo


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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