Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: Jun - 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 9/2/2022
| OEM | TEL | ||
| Tool Model | Tactras-Vesta NV | ||
| Process | Poly | ||
| Software Version (include revision #) | Tactras-ECC Ver6.35-Rev501-STD-6.35a | ||
| System Power Rating | 200 AC 3-Phase for System | ||
| Loading Configuration | 3 load port | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | Loder Module | - | |||
| Chm/Unit Position 2 | VTM | N2 | |||
| Chm/Unit Position 3 | Purge storage | ⁻ | |||
| Chm/Unit Position 4 | Process module 1 (Vesta NV) | Cl2,HBr,NF3,CF4,O2,SF6,Ar | |||
| Chm/Unit Position 5 | Process module 2 (Vesta NV) | Cl2,HBr,NF3,CF4,O2,SF6,Ar | |||
| Chm/Unit Position 6 | Process module 3 (RT3) | N2,O2 | |||
| Chm/Unit Position 7 | Process module 4 (RT3) | N2,O3 | |||
| Chm/Unit Position 8 | Process module 5 (Vesta NV) | Cl2,HBr,NF3,CF4,O2,SF6,Ar | |||
| Chm/Unit Position 9 | Process module 6 (Vesta NV) | Cl2,HBr,NF3,CF4,O2,SF6,Ar | |||
| Tool: | |||
| Process Unit: | Model: | ||
| Controller: | EC | ||
| MFC/Pressure Unit: | FCS Device-net I/F Type
(CKD) CM1(PM1,2,5,6):628D11TDE2P(MKS) CM2(PM1,2,5,6):E28DRETDF2P(MKS) CM1(PM3,4)：51B12TGA2BA100(MKS) CM2(PM3,4)：41B13DGA2AA040(MKS) | ||
| Drive Mechanisms: | Yasukawa LM：Z
shaft、R shaft、H1 shaft、H2
shaft、θ：AC Servomotor TM：Y shaft(Slider):AC Servomotor r shaft,θ shaft:DD motor | ||
| FOUP Opener: | |||
| Gas System: | 16 lines | ||
| Exhuast System: | TMP(STP-XW3503Y) TM/LLM PUMP：MU100U-148 |
Fab15 confirmed there were no missing or damaged parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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