Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)
Date of Manufacture: 2009
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Boise, United States
Available date: Currently Available
Centura mainframe and 1 chamber.
|Tool Model||AMAT Centura AP|
|Process||Process workstations listed below|
|System Power Rating||208VAC 3-phase|
|Loading Configuration||3 LP's|
|Detailed Description||Mfg Part|
|PUMP TURBO 2700RPM ISO320/KF40 1/4FVCR PURGE 240VAC||3620-00530|
|GEN RF 13.56 MHZ, 3.0KW PARAMOUNT 3013, 3PHASE 208||0190-33822|
|CABLE ASSEMBLY, HN(M) TO HN(M) R/A, PULSAR||0190-33595|
|MATCH RF 13.56 MHZ, 1.5KW PARAMOUNT 1513, 3PHASE 208||0190-41508|
|RF GEN, PLASMA, 5KW, 2MHZ, MKS||0190-44105|
|AE, RF MATCH, 2/13 MHZ, 20/60 A, 4 KV, B20N OUTPUT CONN||0190-41476|
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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