Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. Trias Ti/TiN Chamber

Asset ID: 69496

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Tokyo Electron Ltd.

Trias Ti/TiN Chamber

Parts/Peripherals

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Donor Mainframe SN: C13963

Chamber 1 SN: TTN00672
Chamber 2 SN: TTN00673
Chamber 3 SN: TTN00674
Chamber 4 SN: TTN00675

Gaspanel Configuration    
Mass Flow Controller(ClF3 500 sccm)    ClF3 500sccm Hitachi Metals SFC1470FAMC-4UGLN
Mass Flow Controller(N2 600/200 sccm)    N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL
Mass Flow Controller(NH3 5000 sccm)    NH3 5000sccm Hitachi Metals SFC1481FAMC-4UGL
Mass Flow Controller(NH3 300 sccm)    NH3 300sccm Hitachi Metals SFC1480FAMC-4UGL
Mass Flow Controller(N2 600/200 sccm)    N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL
Mass Flow Controller( NH3 1000 sccm)    NH3 1000sccm Hitachi Metals SFC1480FAMC-4UGLK
DLI Vaporizer TiCl4 100sccm    TiCl4 100sccm STEC VC1310-UC-19 SEF-8240SL-UC-VM03
Heater Bottm Purge    N2 300sccm Hitachi Metals 280ERC-4VQ

GAS BOX ASSY, 300TIN,SDFAR25-S     
Aire Operation Valves    Fujikin MEGA series
Gas Filter    Covalent Materials CEP-STM-2HS-FV7
Regulator    Veriflo SQ2MICRO302PUPGPA

Process Kit    
STG HTR      3M87-060128-13 
TiN Shower Base    3M10-204535-11
V3 SHOWER SPARE  (includes below items)    3M87-054539-11
PLATE SHOWER SPACER 300TIN S1    3M10-150079-11
PLATE SHOWER HEAD 300TIN    3M10-101634-11
BLOCK,GAS DIFFUSION    3M10-313563-11
SCREW SHORT HEAD M6*15    3M10-410281-11
SCREW SHORT HEAD M6*28    3M10-410282-11
SPRING WASHER SPAK M6    3M10-410283-11
TUBE,GAS INLET 300TIN    3M10-410298-11
WASHER FLAT..M6 MA22 RGLR    032-000841-1 

Major components    
1333Pa Manometor    3M36-000113-11 631C-28494 (MKS)
133kPa Capacitance manometer    3M36-050152-12 CDG160A-S 133KPA (INFICON)
O-rings    3M87-032321-1 PARTS KIT,RPL CH O-RING_300T
For stage heater     Dupont KALREZ7075UP AS568A-247 BLK
For lid    Dupont KALREZ4079 AS568A-390 BLK
  For gas inlet    Q'ty:3 Dupont KALREZ4079 AS568A-312 BLK
O-rings    3M87-032311-1 PARTS KIT,RPL GV O-RING_300T
Gate    3M12-012910-11 FG1232-KL03 (KITZ SCT)
 Gate    Dupont KALREZ4079 AS568A-274 BLK
Gate Valve (Slit Valve)    3M12-012890-22 UXG1232H-KL-77 (KITZ SCT)
APC Valve    3M12-050473-13 HVR-50HK-R (FUJI IMVAC)
Vacuum valve(VEP1)    3M80-000827-12 IVBH50CA-NWKL-52-W (KITZ SCT)
Vacuum valve(VEP2,3)    3M80-001344-14 IVBH50CY-NWKL-59-W (KITZ SCT)

Other    
Differential Press. Gauge for exhaust system    SUNX  DP-M2
Flow Meter for cooling water    Tokyo Flow Meter FF-MRA80-1-TYL3
Water Leak Sensor    Toyokokagaku RS-1000C-NC/RS-1000D-6417
Divert Interlock Interface    Relay unit for collective signal input
 

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