Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

Applied Materials Reflexion LK

Asset ID: 207523

Print spec sheet

Applied Materials

Reflexion LK

Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Vendor Tool Serial #412183 
Date of Tool Move-In31-May-07 
Tool Availability Date  
Tool Current StatusIdle 
ProcessSOW 
Software Versionlp384.8_52 
System Power Rating 208v 3 Ø 60Hz(eg. 110 AC 3-Phase for System)
Loading Configuration3 load ports(eg. 6 load positions for furnace or dual auto-indexer loaders)
Chm Position   1Slurry A 
Chm Position   2Slurry Bnone
Chm Position   3Slurry C 
Chm Position   4Slurry Dnone
Chm Position ___Brush Box1 Chem 1TMAH 0.063
Chm Position ___Brush Box2 Chem 1TMAH 0.063
Chm Position _____________________________________________________
   
System Configuration  
Description  
Tool:  
Polisher - 3 platens  
Polisher - 4 heads (head 4 rotation is non-functional) 
Dry Metrology 3090 next  
Cleaner - Running Beam  
Cleaner Modules - Input Buffer, Megasonics, 2 brush Boxes, Desica Marangoni Dryer


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.