Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Metal CVD (Chemical Vapor Deposition)
Date of Manufacture: 2016
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: ASFD
Software Version: V3.670R1
System Power Rating: 200V AC 3-Phase
Loading Configuration: 3 lots loading
Chm Position 3: EXII TIN; Chemical: TiCl4. Gas: TiCl4/NH3/ClF3/N2
Chm Position 4: EXII TIN; Chemical: TiCl4. Gas: TiCl4/NH3/ClF3/N2
Process position: Trias SFD TiN / SFD TiN / EX-II-TiN / EX-II-TiN
Process capability: SFD TIN/ ASFD TiN
Factory Interface System
Carrier: FOUP 25 slots cassette
Number of Load Port: 3 (Left and middle Right, BOLTS-M)
Loader arm: Dual arm type/Tape Pick
Mini-environment FFU filter: DAIKIN 0.1um ULPA
The number of LLM: 2 (Cooling stage built-in)
LLM bleed gas: N2
MMI: Q'ty:2 MMI
MMI fixing bracket: The MMI fix at stand
Loadport Carrier ID reader: Q'ty:3 (OMRON Master:Master:V700-L22-6)
Wafer ID Reader: Cognex
Loadport I/O Interface: Q'ty:3 OHT Hokuyo Electric：DMS-HB1-Z
Loadport Version: v5.0
TPU Interface Kit: The module stops operating upon alarm
Transfer, Vaccuum, Exhaust, Cooling Water Systems
Transfer arm: Twin pick type
TM bleed gas: N2
The number of Aligner: 1 (located in LM)
Power Fail Endurance: Facilities UPS
TM Robot: BX80-000231-11 ARM,YE2 WO PICK..HU0482146 (YASKAWA)
Loader Robot: BX80-080118-13 Type:SBX92102651-2 (SHINKO)
Loader Robot Controller: BX80-070955-15 Type:SBX92301334-5 (SHINKO)
Pressure sensor: INFICON VSA100A
Pirani sensor: INFICON PSG100-S
Capacitance Manometer: MKS 626B02TDE
LLM1/LLM2-Door valve: SMC CBM2B40-N4640-90
LLM1/LLM2-Gate valve: V TEX I-I-00078-2-01
Flowmeter: Tokyo Flow Meter FF-MRA80-21
Water leak sensor: Toyokokagaku RS-3000C-CL/RS-3000FA-6440
Remote Units
Main Power Distribution: 3M80-002796-13 Trias MPD S2 T3
Trans Box: 3M80-003038-12 Trias TR2 S2J T3
Utility Terminator Rack: None
PM Dry Pump: Edwards iXH1220HTX+
TM Dry Pump: Edwards iH1000
LL Dry Pump: Edwards iH1000
Abatement System: DAS ESCAPE
TiCl4 Cabinet: Air products GC300
Gas Supply Config
Manual valve N*: Fujikin FUDDFL-21-6.35-UGF-APD
Regulator (N2-1/N2-2):
Regulator (N2-PF): Tescom 12H1A21IGS2W-036
Regulator (Ar): Veriflo SQ-2MICRO-60-2P-UPG-PA
Pressure sensor (All gas line): SUNX DP2-22
Filter (N2-PF): Covalent Materials BFA-02-100-ST-02
Manual valve (Dry air line): SMC VHS40-04-B/VHS20-02-B
Filter (Dry air line): Koganei F300-03-B
Regulator (Dry air line): Koganei R300-03-W/O G
Pressure sensor (Dry air line): SUNX DP2-22
Pressure gauge (Dry air line): SUNX DP2-22
Chamber TEL TRIAS TIN
1333Pa Manometor: 3M36-000364-11 SENSOR,PRESSURE 631C-30603
133kPa Capacitance manometer: 3M36-000096-12 MKS SENSOR,PRESSURE
O-rings: 027-008465-1 O-RING..KALREZ7075 AS568-387 BLK 1ea 027-008555-1 O-RING..KALREZ7075 AS568-312 BLK 2ea
O-rings: 3M87-065949-1 EXCHANGE KIT,GV O-RING+PLT E2 O-ring and Plate
O-rings, Trap I/O: 027-008434-1 O-RING..KALREZ7075 NW-50 BLK
Gate Valve (Slit Valve): KITZ 3M12-000150-13 VALVE,GATE UXG1236H-KL-122
APC Valve: TEL 3M12-000153-11 VALVE,BUTTERFLY PCV-50-1
Cubic Trap: Milaebo Trap
Vacuum valve(VEP1): KITZ 3M12-000151-13 VALVE,VAC IVBH50CA-NWKL-144-W-(RS)
Vacuum valve(VEP2,3): KITZ 3M12-000151-13 VALVE,VAC IVBH50CA-NWKL-144-W-(RS)
Pressure Gauge, exhaust system: KRONE KU-604 series
Gas Box Configuration
Gas Stick 1: N2 Bottom Purge 5SLM HORIBA STEC SEC-N100 series
Gas Stick 2: N2 5SLM HORIBA STEC SEC-N100 series
Gas Stick 3: N2 5SLM HORIBA STEC SEC-N100 series
Gas Stick 4: N2 2SLM HORIBA STEC SEC-N100 series
Gas Stick 5: empty
Gas Stick 6: N2 300sccm HORIBA STEC SEC-N100 series
Gas Stick 7: TiCl4 200sccm HORIBA STEC SEC-8000F/D series
Gas Stick 8: empty
Gas Stick 9: empty
Gas Stick 10: NH3 10SLM HORIBA STEC SEC-N100 series
Gas Stick 11: NH3 1SLM HORIBA STEC SEC-N100 series
Gas Stick 12: ClF3 500sccm HORIBA STEC SEC-N100 series
Heater Bottom Purge: N2 5SLM HORIBA STEC SEC-N100 series
Air Operation Valves: CKD Chamber valve
Gas Filters (N2-1/N2-2): Nippon Seisen NASclean GF series, Trapping sfficiency 1.0um
Gas Filters (NH3/ClF3): Nippon Seisen NASclean GF series, Trapping sfficiency 1.0um
Regulators: CKD PGM series
Gas lockout system: SMC Valve
Process Pump/Abatement
PM Dry Pump: Edwards iXH1220HTX+
Abatement System: DAS ESCAPE
Kit Parts
STAGE HEATER ASSY,ELPR STG HTR Ver2.4: 3M87-065396-14 HEATER ASSY,STAGE WOR
Flat Cap: F-Cap
PLATE,CAP INJ P: 3M10-254214-11
PLUG,GAS DIST2: 3M10-456932-11
PLATE,GAS DIST P: 3M10-254282-11
RING, INNER LB: 3M10-254147-11
LID(O) ASSY, COOL: 3M87-068880-11
BLOCK, INLET: 3M10-151466-11
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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