Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Metal CVD (Chemical Vapor Deposition)
Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: TRIAS
Software Version: V3.700R1
System Power Rating: 200V AC 3-Phase
Loading Configuration: 3 load ports
Chamber 1:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2
Chamber 2:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2
Chamber 3:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2
Chamber 4:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2
Process Unit: EXII TISIN
Controller: P/N : BX80-000222-11, BOX ASSY,EQUIPMENT CONT BOX
Process position: Trias EX-II TiSN
Process capability: TiSIN
Chamber hardware: EXII TISIN
System Software
Software Revision: SYSTEM:V3.700R1
Factory Interface System
Carrier: FOUP 25 slots cassette
Number of Load Port: 3
Loader arm: Dual arm type/Taper Pick
The number of LLM: 2
LLM bleed gas: N2
Transfer, Vaccuum, Exhaust, Cooling Water Systems
Transfer arm: Twin pick type
TM bleed gas: N2
The number of Aligner: 1 (located in LM)
TM Robot: BX80-070760-17 ARM,WO PICK,C..BR942304 (YASKAWA)
Loader Robot: BX80-080118-12 Type:SBX92102651-2 (SHINKO)
Pressure sensor: INFICON VSA100A
LLM1/LLM2-Door valve: SMC CBM2B40-N4640-90
LLM1/LLM2-Gate valve: V TEX I-I-00078-2-01
Chamber TEL TRIAS TIN
1333Pa Manometor: 3M36-000364-11 SENSOR,PRESSURE 631C-30603
133kPa Capacitance manometer: 3M36-000096-12 SENSOR,PRESSURE
Gate Valve (Slit Valve): KITZ 3M12-000150-13 VALVE,GATE UXG1236H-KL-122
APC Valve: 3M12-000207-11 VALVE,BUTTERFLY PCV-50-2
Cubic Trap: MATC MATE-0027PM (V9 trap)
Pressure Gauge, exhaust system: KRONE KU-604 series
Flow Meter for cooling water: TOFLO TPS series
Divert Interlock Interface: no divert line
Gas Box Configuration
Gas Stick 1: N2 5slm HORIBA STEC
Gas Stick 2: N2 10slm HORIBA STEC
Gas Stick 3: N2 10slm HORIBA STEC
Gas Stick 4: N2 2slm HORIBA STEC
Gas Stick 5: N2 10slm HORIBA STEC
Gas Stick 6: N2 300sccm HORIBA STEC
Gas Stick 7: TiCl4 300sccm HORIBA STEC SEC-8000F/D series
Gas Stick 8: empty
Gas Stick 9: empty
Gas Stick 10: NH3 10SLM HORIBA STEC
Gas Stick 11: NH3 2SLM HORIBA STEC
Gas Stick 12: ClF3 500sccm HORIBA STEC
Gas Stick 13: DCS 200sccm HORIBA STEC
Heater Bottom Purge: N2 5slm HORIBA STEC
Gas Filters (N2-1/N2-2): Nippon SeisenNASclean GF series
Gas Filters (NH3/ClF3): Nippon SeisenNASclean GF series
Regulators: CKD PGM series
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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