Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Rudolph Technologies, Inc. S3000S

Asset ID: 209611

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Rudolph Technologies, Inc.

S3000S

Film Thickness Measurement System

Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 4/1/2022

METROLOGY 15-3ONTO_S3000S_THKMTL_01 DNS S3000S THKMTL


Tool has been de-installed and is stored in an off-site warehouse.

Damaged parts: One 5W LASER, VITTESSE 2, VER. C-Refurbished (Part Number RXP23721-Refurb) damaged.

Missing parts: Fab15 confirmed there were no missing parts.


System is non-operational due to non-functioning laser.

CONFIGURATION:

OEM  ONTO
Tool Model  MetaPULSE300
Process  Metal
Software Version (include revision #) 7.847P
System Power Rating  200 AC single phase for System
Loading Configuration  2port
Tool:      
Process Unit:  Model:Remark  
Controller:  N/A   
MFC/Pressure Unit:  N/A   
Drive Mechanisms:  Power / CDA  Power1 / CDA1
FOUP Opener:  Brooks Japan  2Port
Gas System:  N/A   
Exhuast System:  N/A   
(Main)Power cable 3m over
(Chiller)Power cable 5m over
(Chiller) water cable 4m over
Safety:
EMO
Interlock


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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