Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

LAM Research 2300e4 Exelan Flex DX

Asset ID: 207651

Print spec sheet

LAM Research

2300e4 Exelan Flex DX

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Chungcheongbuk-do, Korea, Republic of

Available date: TBD

 

2300 SYSTEM

1 * Seismic Brackets TM

1 * Weight Dist. Plates TM

3 * Seismic Brackets PM

1 * Deliv Opt: Cust Pickup at Country of Mfg

3 * 2300 Flex DX

1 * 2300e4 Platform

2300 PROCESS MODULE

2300 FLEX D SERIES OPTIONS

3 * 4XX Series ESC

3 * PM Facilities: Dual w/ Temp Monitor

 

3 * 10 GPM Flow Meter

3 * Gas Feed: eDGF+

60 MHz Generator

Dual Zone ESC Cooling - Flex

D Series

Heated Foreline Manometer

Top Pl Chamber Manometer:

Baffle

Lower Isolation Valve: Viton

Dry

Chemraz Vacuum Valve

Interconnect Hardware: Pump

to TCU 100ft

Interconnect Hardware: TCU to

PM 100ft

 

3 * Interconnect Hardware: Pump to PM 100ft

 

3 * EMO Cable: TCU to RPDB 50ft

3 * EMO Cable: Pump to RPDB 50ft

1 * 2300 Flex D Series Quick Clean Kit

 

2300 GAS BOX

2300 FLEX D SERIES JETSTREAM

30 * Jetstream Gas Line

6 * Heated Gas Line

51 * Horiba D519

17 * SST Facility Interface Box (System)

 

17 * SST Facility Interface Box (Per Line)

 

1 * Future PM Containment SST FIB

1 * UI Display w/ Disp Trans (First Line)

 

16 * UI Display w/ Disp Trans (Addnl Line)

 

2300 PLATFORM (E)

3 * Hermos Carrier ID

1 * Additional Load Ports

3 * Corrosion Resistant LPM

1 * WIDS Btm Read

1 * RGV/OHT PIO Sensor

1 * Conditioning Station (7 Wafer)

 

1 * 25 Slot Aux Buffer (Corr Res)

1 * Vespel Wafer Fingers

1 * Edwards (iXL)

1 * Vespel Single Sense

1 * Advanced Aligner

1 * User Interface: Side and Front Monitor U

 

1 * System UPS Circuitry

1 * Internal UPS Bypass w/UPS Installed

 

1 * Earth Leakage Breaker

1 * Cable: TM-Subpanel, 100ft

1 * Signal Light Tower, R-G-A Slim Line

 

1 * Light Curtain

1 * Input Buffer Corr Res w/o Exh

1 * Flow Monitoring

1 * Sys Calibration and Alignment

1 * Service Step for PM

1* Ionizer kit

1 * ATM Duct Interface

1 * Robot CDM

1 * Light Tower Buzzer

1 * Metric to Inch Conv. Fittings

1 * APCS

1 * SVID & Facility Interface Board

1 * VTM Breakout Board/Cover

1 * 2nd TM Pump Std w/ EQ

2300 PERIPHERALS

3 * Cust. Supply: Non-Qual 2 Ch TCU

1 * Gateway Communication

2300 SHIP AHEAD

Standard Ship Ahead Items

2300 ADDITIONAL ENHANCEMENTS

Customized Service

Std Process Qual (no ext qual)

Standard Training

2300 SOFTWARE

TEK Software

Wafer Flow Tuning

APC Recipe Tuning Host

2nd HSMS

NSR8423, Hardware Firewall

EDA2

NSRL1000, Local Office

Subtotal

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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