Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) Tactras Vigus

Asset ID: 12054

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Tokyo Electron Ltd. (TEL)

Tactras Vigus

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: July 2011

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Fab15 confirmed Six (6) bottom chillers are not included in tool for sale.

No missing parts.

Defective part: One (1) TM/LLM DRY PUMP.


All chambers are a HARC Chamber.

For more details, please see configuration.


TEL
Tactras-Vigus
Oxide
Ver5.05-Rev502-STD-5.05a
200 AC3-Phase for System
3 load port


   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  Loder Module- 
Chm/Unit Position   2  VTMN2 
Chm/Unit Position   3  Purge storage 
Chm/Unit Position   4  Process Module 1  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He
Chm/Unit Position   5  Process Module 2  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He
Chm/Unit Position   6  Process Module 3  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He
Chm/Unit Position   7  Process Module 4  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He
Chm/Unit Position   8  Process Module 5  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He
Chm/Unit Position   9  Process Module 6  (VIGUS)C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He


Tool:   
Process Unit:  Model:
Controller:  EC
MFC/Pressure Unit:  FCS Device-net I/F Type (Fujikin)
CM1DNARETGAFKNV633 (MKS)
CM2
DMA11TGAEKNN633 (MKS)
Drive Mechanisms:  Yasukawa LMz軸、R軸、H1軸、H2軸、θACサーボモーター
TM
y(スライダ):ACサーボモーター
r
:DDモーター
FOUP Opener:  KWF-12C-T1(K-BL-601HAC1-SO-E)
Gas System:  1.125 inch Accumulation(CKD)
13 + 3(Edge-Add-Gas)
Exhuast System:  TMPTMP-W3503LMC(T4)(VG250)(SHIMADZU)
TM/LLM PUMPMU100U-147 (KASHIYAMA)




Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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