Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

DAS ESCAPE DUO

Asset ID: 209458

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DAS

ESCAPE DUO

Chemical/Gas Treatment System

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 29- Not overhaul (controller is not included)


AreaAsset descriptionoverhaul資產序號S/Nlocation
FSESCAPE DUON3DJY037Q1500-003/10/52141A13.5-10.5
FSESCAPE DUON3C53DA014300-003/08/51663A12-3
FSESCAPE DUON3C53DA011200-003/07/51610 
FSESCAPE DUON 03/04/5880A13-4
FSESCAPE DUON3C53DA010100-003/07/51602A14.5-10
FSESCAPE TWINN 03/03/5783A8.5-5.5
FSESCAPE TWINN 03/03/5780A10-5.5
FSESCAPE DUON3A53DA013100-003/04/5920A9-4
FSESCAPE DUON3A53DA016600-003/06/51144A10-3.5
FSESCAPE DUON 03/04/5883A7.5-9
FSESCAPE DUON 03/05/51046A8-9.5
FSESCAPE DUON3A53DA016500-003/06/51162A10-10.5
FSESCAPE DUON3D53DA012700-003/10/52035A21-7
FSESCAPE DUON3D53DA013200-003/10/52041A10.5-4.5
FSESCAPE DUON3HJR037Q3800-0AD3-14-3405A10.5-4.5
FSESCAPE DUON3C53DA014800-003/08/51652A15.5-8.5
FSESCAPE DUON3D53DA013800-003/10/52138A12.5-4
FSESCAPE DUON3B53DA014600-003/06/51285A3.5-4.5
FSESCAPE DUON3B53DA01B500-003/07/51436A4.5-4
FSESCAPE DUON3C53DA012100-003/08/51685A2.5-3.5
FSESCAPE DUON3B53DA01A200-003/07/51431A1.5-8
FSESCAPE DUON3B53DA017700-003/07/51379A1.5-7.5
FSESCAPE DUON3B53DA013800-003/06/51241A1.5-5.5
FSESCAPE DUON3B53DA016400-003/06/51243A4-7.5
FSESCAPE DUON3D53DA010300-003/09/51981A2-5
FSESCAPE DUON3B53DA016300-003/06/51267A1.5-6
FSESCAPE DUON3B53DA018300-003/07/51371A8.5-11.5
FSESCAPE DUON3C53DA012900-003/08/51683 
FSESCAPE DUON3D53DA012800-003/09/52032 



Technical Data

  • Dimensions (W x D x H): 1650 mm x 675 mm x 1800/2070 mm
  • Access to maintenance area on front and back side
  • Gas entry: max. 4x DN25 or DN40
  • Gas outlet: max. 2 x DN100

Specifications

  • Up to 2 independent waste gas and backup lines per reactor
  • Operation time > 99% through backup function
  • Second reactor allows uninterrupted operation during maintenance
  • Runs with different fuel gases and scrubber liquids
  • Low water consumption through closed-loop design
  • Available in two sizes


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