Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) Expedius+

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Asset ID: 16157

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Tokyo Electron Ltd. (TEL)

Expedius+

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2007-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available


Application: Light Etch


Tool power off at 12th May 2018


Bath-1: DHF

   Operating: 20°C, HF (49%) / DHF (1:200, 1:500), circulation, 15 L/min

   Chemical spiking: auto concentration feedback

   Bath Material: PTFE


Bath-2: POU

   Operating: 70°C, NH4OH/H2O2

   DIW Shower (hot / cold)

   Bath Material: PTFE

   Megasonic: 950 kHz, 2400W (600*4)


Bath-3: POU

   Operating: 70°C, NH4OH/H2O2

   DIW Shower (hot / cold)

   Bath Material: PTFE

   Megasonic: 950 kHz, 2400W (600*4)


Bath-4: POU

   Operating: 70°C, NH4OH/H2O2

   DIW Shower (hot / cold)

   Bath Material: PTFE

   Megasonic: 950 kHz, 2400W (600*4)


Dryer: SD2 *2

   Operating: 49% DHF (1:200), IPA/N2 200°C, 100 L/min

   Resistivity monitoring (Horiba)

   Bath Material: PTFE


Damaged / Missing parts:

Missing- TEL Part No. CS014-001281-1, FUSE,THERMAL..30177840, Qty 3

Missing- TEL Part No. CS024-025817-1, AIR CYLINDER..CDJ2B16-45Z-B, Qty 2

Damage- TEL Part No. CS1B50-000012-13, PERSONAL COMPUTER..EC-TKL3-T/L, Qty 1

Missing- TEL Part No. CS1B80-002802-11, BOARD,I/O 16 CN, Qty 1

Missing- Part No. 049-001334-1 I/O unit SEQ CONTR

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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