Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: APR 2020
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
|Software Version (include revision #)||v1.80a04-12|
|System Power Rating||380 AC 3-Phase|
|Loading Configuration||3 Load Port|
|Vendor Chm Model||Chemicals / Gases Used (not to use Micron Proprietary names)|
|Chm/Unit Position 1||1157-259-01||HfCl4|
|Chm/Unit Position 2||1069-556-01||UPW|
|Process Unit:Pulsar Reactor Chamber||Model:AXIS|
|MFC/Pressure Unit:Horiba STEC Z7xx series|
|Drive Mechanisms:CDA, Electricity|
|FOUP Opener:3 ports|
|Exhuast System:EDWARDS Pump(iXH610/iXH1000N)|
Fab15 confirmed there were no missing or damaged parts.
Please inspect tool to reconfirm.
Dry pumps and customer provided items are listed in tool's configuration but not included in tool for sale.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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