Macquarie Semiconductor and Technology on behalf of Micron Japan, Ltd.
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
X,Y Overall Accuracy：±2.0µm (Temp Stability ±1℃
X,Y Stage Accuracy：±1.0µm
Z Axis Stroke(Applicable stroke)：37mm
Z Axis Control Accuracy：±2µm
Temp. Range：-40 to 150℃
Tool was connected with a T5377S tester before de-installation.
HINGE INCLUDED IN TOOL. MODLE: MHF6000.
Tool has been de-installed and is stored in an off-site warehouse.
A Hard Disk Drive will be removed from tool.
Other missing or damaged parts: Not reported.
No pictures provided: Please inspect to collect photos.
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