Tokyo Electron Ltd. (TEL) TELINDY Plus Oxide

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Process: Oxide

Software Version: V6.07 VER:002

System Power Rating: 120V & 480V

Loading Configuration: 4 lots Loading

General Specification

Safety Specification: SEMI S2-0703/CE

Heater Model: Low-Temp. VMM-56-201 4zone / 150-600 (C) 

Process Condition: LP

Maximum Operating Temperature(C): 250-300

ART Control: None

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100

Boat Operation (Handling Position): 2 Boat Type (B/E)

Software Version (WAVES): Ver.6.07 Rev.002

Seismic Isolation Configuration: None

Dewpoint Meter for N2 Load Lock: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: N/A

Ionizer Maker / Model: None

Chemical Pre-filter (for Acid): None

Chemical Pre-filter (for Alkali): None

Chemical Pre-filter (for Hydrocarbon): None

Chemical Pre-filter Location: N/A

Side Maintenance: None

O2 Density control for N2 Load Lock: Yes

N2 Boat Shower Wafer Cooling: Yes

Furnace Temperature Controller: Model560A

Carrier Type: FOUP / 25slots SEMI STD

FOUP Maker / Model: Entegris / A300

Carrier Stage Capacity: 16

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3+PEEK

W/T Type: 1+4 Edge Grip

W/T Auto Teaching: Yes

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

RCU Duct Connection Point: N/A

Gas Specification

IGS Type: IGS 1.5"W-seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend (Less than 90deg.)

IGS Final Filter: PALL(SUS)

IGS Regulator: CKD

IGS MFC Maker / Type: HORIBA STEC / Digital

IGS Press. Transducer: Nagano

Liquid Source Vapor System Maker / Model: 

Liquid Source Vapor System Maker / Model: HORIBA STEC / LSC F730 Series

Auto-Refill System Maker / Model: SCHUMACHER / CG400

Auto-Refill System Provided By: Customer

Refill System Tubing Interconnect By: Customer

Ozone Delivery System Maker / Model: MKS / AX8575-29

Ozone Delivery System Provider: Customer

External Torch Unit: N/A

Water Vapor Generator (WVG): N/A

PAC: None

Incoming Gas Connection Point: Bottom Connection

Gas Vent Connection Point: None

Exhaust Vent Connection Point: Bottom Connection

Gas Unit Exh. Connection Point: Bottom Connection

Process Gas Exhaust Connection Point: Bottom Connection

Exhaust Specification

Vacuum Gauge - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gauge - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gauge - Pump Monitor: MKS (Hot) Capacitance Manometer

Main Valve: CKD-VEC

Pump Maker / Model: EDWARDS / IXH-1820

Pump Provided by: Customer

Abatement System Type: Burning Type

Abatement System Maker / Model: Edwards / ATLAS-TCS 

Abatement System Provided by: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: Power Box

Pump-FNC Vacuum Piping Provided By: Customer

Exhaust Pressure Control for AP Process: N/A

Exhaust Pressure Controller for AP Process Maker / Model: N/A

Vacuum Exhaust System: 4inch Pipe

Trap: N/A

Vacuum Pressure Controller: CKD-VEC

Burn Out Unit: N/A

Condenser: N/A

Reactor Specification

Quartz Meterial Requirement: Electric Fused

Quartz Provided by: Customer

Quartz Vendor Requirement: None

SiC Provided by: N/A

SiC Vendor Requirement: N/A

Liner Tube (AP): N/A

Process Tube (AP, AP+Sub-AP): N/A

Outer / Inner Tube Material (LP): Quartz / Quartz

Inner Tube Type (LP): Fixed top plate Narrow slit, 5mm gap (special ,see below)

Inner T/C: Outer Tube interior wall type (for CVD)

Tube Sealing: O-Ring

Manifold Heater: Yes

Switch Valve for Manifold Cooling Water: Yes

Soft Backfill Injector: Yes

Boat Type: 117 slots Ladder(8mm pitch)

Boat Material: Quartz

Boat Rotation: Yes

Pedestal Type: Quartz

Turn Table Type: Inconel

Cap Heater: Yes

Auto Shutter: Shutter Purge Type

Earthquake Countermeasure: None

Power Specification

Voltage 3phase: 480VAC

3phase connection type: Star Connection

Voltage Single-phase: 120VAC

Single-phase connection type: Grounded

Frequency: 60Hz

Wattmeter Maker / Model: None

Control Power UPS provided by: Customer

Control Power UPS type: Fab-wide system

UPS Input Voltage / Output Voltage: N/A

Power Cable Input Entrance Location: Power Box Top 

FNC - Power Box: 30m

Power Box - RCU: N/A

Power Box - Pump Unit: 30m

Gas Box - Refill System (if used): 30m

Power Box - WVG CTRL Unit (if used): N/A

FNC - WVG CTRL Unit (if used): N/A

Gas Box - Abatement System (if used): N/A

Power Box - Ozone Delivery System (if used): 30m

Power Box - UPS (if used): N/A

Wiring by: Customer

Conduit/Raceways provided by: Customer

Interface Specification

Host Communications: Comply with GJG

Equipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)

Ingenio: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

PIO I/F Location: FNC Top

PIO Provided by: Customer

PIO Maker /Model: Hokuyo / DMS-HB1-Z

Carrier ID Reader Writer Type: RF

CIDRW Load Port: Read

CIDRW FIMS: N/A

CIDRW Maker / Model: Keyence / BL601

CIDRW Provided by: TEL

CIDRW Tag Orientation: None

EEC (Equipment Engineering Capability): None

Customized Management Signals (for WAVES): WAVES

Signal Tower Model: LOUGWB-24-4 

Signal Tower Colors (from the Top): Red/Yellow/Green/Blue

Signal Tower Location: Front Panel/FilledcType

Front Operation Panel: None

MMI and Gas FlowChart: Gas Box

Indicator Type: Selete

Operator Switch: Operator Access / White Cover with Orange Light

Pressure Display Unit (Gas Inlet / Vacuum): MPa / Torr

Cabinet Exhaust Pressure Display Unit: Pa

Warning Label: Traditional Chinese

Other Specification

Furnace (Exh/Box,Gas/Box included): Main-Fab

Power Box: Sub-Fab

Pump: Sub-Fab

RCU: N/A

Step Up Transformer: N/A

Step Down Transformer: N/A

Ozone Delivery System: Main-Fab

WVG Controller: N/A

Auto-Refill System: Main-Fab

UPS: None

Other Unit Location: N/A

Gas Leak Detector: Yes

Gas Leak Detector Provided By: TEL

Gas Leak Detector Maker: Riken / GD-K77D-A

Gas Detector Power: 120VAC

Gas/Chem Configuration 

MFC A1: Ar Gas Flow [SLM] Full-Scale 10

MFC NA: N2(GB) Gas Flow [SLM] Full-Scale 2

MFC NC: N2(GB) Gas Flow [SLM] Full-Scale 30

MFC NR: N2(GB) Gas Flow [SCCM] Full-Scale 50

MFC N1: N2(GB) Gas Flow [SLM] Full-Scale 50

MFC N2: N2(GB) Gas Flow [SCCM] Full-Scale 500

MFC N3: N2(GB) Gas Flow [SLM] Full-Scale 20

MFC N4: N2(GB) Gas Flow [SCCM] Full-Scale 500

MFC N5: N2(GB) Gas Flow [SLM] Full-Scale 5

MFC N6: N2(GB) Gas Flow [SLM] Full-Scale 1

MFC O2: N2(GB) Gas Flow [SLM] Full-Scale 20

MFC Y1: N2(GB) Gas Flow [SLM] Full-Scale 5

MFC XV1: N2(GB) Gas Flow [SCCM] Full-Scale 500

MFC NL: N2(GB) Gas Flow [SCCM] Full-Scale 1000

MFM_Z1: N2(GB) Gas Flow [SLM] Full-Scale 15

MFC NBS: N2(GB) Gas Flow [SCCM] Full-Scale 400

GEN1N2: O3 GEN_N2 [SCCM] Full-Scale 5

GEN1O2: O3 GEN_O2 [SLM] Full-Scale 30

Damage/Missing parts list

Cannibalized- Thermocouple Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales