Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

Tokyo Electron Ltd. (TEL) TELINDY Plus IRAD Oxide

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Asset ID: 204527

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Tokyo Electron Ltd. (TEL)

TELINDY Plus IRAD Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2013-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available


The equipment use of destructive methods to deinstallation the equipment.

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and customer provided items not included on sales.

Inspect to confirm configuration and condition.

Configuration :

Software Version : Ver.6.07

System Controller is Model 780

The last PM date is 2016/09/24

Off-line date is 2017/11/06

Can produce wafers as is

All cables are present

Platform Type is TELINDY PLUS I-RAD

Process Type is Gate Oxide/SiO2

Temperature Range is Mid Temp 500-800 C


Wafer Handling :

Wafer Type is 300 mm

Carrier Type is 25 slot

Carrier Stage Capacity is special

WTU Type is 1+4 Edge Grip

Production Wafers qty are 100

Boat Operation is 1 Boat Type


Gas Panel Configuration :

MFD Make is ADVANCED ENERGY

Gas MFC Model MFC Size

N2 MFC-NX 50 SLM

O2 MFC-O1 20 SLM

HF MFC-XF1 5 SLM

N2 MFC-N1 10 SLM

N2 MFC-N2 10 SLM

N2 MFC-N3 5 SLM

N2 MFC-N4 10 SLM

N2 MFC-NL 1000 SLM

N2 MFC-NBS 400 SLM

N2 MFC-NR 500 SCCM


Reactor Configuration :

Quartz Material is Electric Fused

Quartz Provide is TEL

Process TUBE is I Red TUBE

TUBE Sealing is special O-ring

Boat Type is 117 slot

Boat Material is Quartz

Pedestal Type is Quartz

Auto shutter is shutter purge type




Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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