Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) TELFORMULA ALD High-K

Asset ID: 200258

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Tokyo Electron Ltd. (TEL)

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: April 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool is being de-installed. A main body unit of the tool will be shipped from Fab15 to an

off-site warehouse on July 27, 2021.

MISSING PARTS: A Power Box, a RCU and an O3 Generator.

Other missing or damaged parts: Fab15 confirmed there were no other missing or damaged parts.

A Gas box will be detached from the main body unit for de-installation and equipment move out

and will stay with the main body unit in the warehouse.

 

UPDATED CONFIGURATION:

Tube Material:Quartz

Boat Material:Quartz

Production wafes:50

Pressure control:APC Valve 

Process Gas:TEMAZ(F.S:1.0sccm),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE

Vaporizer Maker:STEC(TMA,TEMAZ)

Vaporizer TYPE:LSC-F530(TMA),TL-2011(TEMAZ)

MFC Maker:STEC

MFC Model:Z500series

Process Temp:200-300deg

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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