Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: ALDZROX

Original PO Configuration. Audit to verify.

2.2- General Specification
Safety Specification:S2-0706/CE
Heater Model: Low-Temp VMM-56-201 4zone/150-600C without  RCU
Process Condition: LP
Process Temperature (C):300C
ART Control:None
N2 Load Lock:Yes
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 100wfr
Boat Operation: 2 Boat Type / 2 Boat Operation (B/S)
Software Version (WAVES): Ver. 6.07

3.1.1- Furnace Spec, Furnace
Dewpoint Meter for N2 LL: None
Loading Area Light: White (LED)
RCU Duct Length FNC - RCU: None
Ionizer (maker/model): None
Chemical PreFilter-Acid:None
Chemical PreFilter-Alkali: None
Chemical PreFilter-Hydrocarb: Yes
Chemical PreFilter-Location: Side FFU
Side Maintenance: None
O2 Density Control for N2 LL: Yes
O2 ANALYZER Maker: NGK, Model: SH-304 STANDARD
N2 Boat Shower Wafer Cooling: Yes
Furnace Temperature Controller: Model 560A

3.1.2- Furnace Spec, Wafer/Carrier Handling
Carrier Type: FOUP/25slots, SEMI STD
FOUP Maker/Model: Entegris/Spectra
Carrier Stage Capacity: 18 FOUP
Info Pad A,B: Pin
Info Pad C,D: Pin
Fork Material: Al2O3+PEEK
W/T Type: 1+4 Edge Grip
W/T Type A/T: None

3.1.3- Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Poi: Top Connection
Cooling Water Connection Point:Bottom Connection
RCU DUCT Connection Point:N/A

3.2.1- Gas Spec,  Gas Distribution System
IGS Type: IGS 1.125"W-seal rail-mount        
IGS Maker:Fujikin    
Tubing Bends:Bend (Less than 90deg)                
IGS Final Filter:PALL                
IGS Regulator: CKD                
IGS MFC (Maker/Type):AE / Digital        
Water Vapor Generator(WVG):N/A            
IGS Press. Transducer: NAGANO            
Liquid Source Delivery- 3DMASi: AS-102S-B5/3DMASi 300sccm MCAC./ADVANCED ENERGY
Auto Refill System- 3DMASi:Customer Provided - Bulk 3DMASi delivery system CG325/CG400 GEN II or  CG325 GEN II    Scumacher- Chemguard
Auto Refill System Provider: Provided by customer                
Refill System Tubing interconn: Provided by customer                
Ozone Delivery System (Maker/M:"Maker: MKS
Model: AX 8575-29"        
Ozone Delivery System: Provider    customer        0        
Liquid Source Delivery- Zr:Onboard Zr bubbler, ergonomic version        
Liquid Source Delivery- X precursor: Onboard Ti bubbler, ergonomic version        
Liquid Source Delivery- TMA: Onboard TMA bubbler, ergonomic version        
HTR9.1,FLAT,AMPOULE,0DP0: Insulation, Ampoule, Top/9399-0975/MKS
HTR,INS,NBV,MAN KNOB:Insulation, Valve Knob,9599-0665/MKS
HTR2.5,STR6.21,SPEC,1EP0:Insulation, bypass,9525-0060/MKS
HTR2.0,STR5.5,SPEC,1EP0:Insulation, outlet,9520-0839/MKS
HTR2.0,STR5.5,SPEC,1EP0:Insulation, inlet,9520-0840/MKS
Wrap around valve heater (MKS):Valves heated by wrap around heaters supplied by Supplier        

3.2.2- Gas Spec,  Gas Facilities
Wrap around ampoule heater (GL:    Ampoule heated by wrap around heaters supplied by Supplier    
Incoming Gas Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.
Gas VENT Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.
Exhaust VENT Connection Point: Bottom Connection OPT: Ordering Fab must verify facility requirements and note any special requirements within the PO.
Gas Unit Exh Connection Point: Top Connection    
Process Gas Exhaust Connection    Bottom Connection: OPT: Ordering Fab must verify facility requirements and note any special requirements  within the PO.

3.3.1- Exhaust Specification
Exhaust Pressure Control (AP): N/A
Exhaust Pressure Controller (A: N/A
Vacuum Exhaust System: 3inch Pipe
Trap: N/A
Vacuum Pressure Controller: CKD-VEC
Burn Out Unit: None

3.3.1- Exhaust Specificationbution
Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer    
Vacuum Gage - Press Monitor (1: MKS (Hot) Capacitance Manometer    
Vacuum Gage - Pump Monitor:MKS (Hot) Capacitance Manometer    
Main Valve: CKD-Hi-Speed VEC    
Pump Maker/Model: EDWARDS/IXH1820, OPT: Pump is customer Provided. Ordering Fab must verify pump is purchased for all process chambers.
Pump Provided by: Provided by customer    
Abatement System Type: Burning Type    Abatement maybe different based on Fab specification.
Abatement System (Maker/Model): Orient service Co.,Ltd / GDO1862-WA    Abatement maybe different based on Fab specification.
Abatement System Provider: Customer    
N2 Dilution Unit Provided by: Customer    
Pump Power: Customer    
Pump Control Unit Setting Loca: Power Box Top    
Pump-FNC Vacuum Piping Provide: Customer    

3.4.1- Reactor Specification
Quartz Provided by: Optional, OPT: Ordering Fab must verify if Supplier is to provide,  if so QTY= 1. If Customer to provide then set QTY=0, Default = 0 note any special requirements within the PO.
Quartz Vendor Requirement: Must be Customer qualified supplier    
SiC Provided by:N/A    
SiC Vendor Requirement: N/A    
Liner Tube (AP):N/A    
Process Tube (AP, AP+Sub-AP):N/A    
Outer/Inner Tube Material: Quartz / Quartz    
Inner Tube Type (LP): Cross-flow inner tube Type with narrow slit and wider pitch tab is used (slit size 1007 mm)    
Inner T/C: Outer Tube interior wall type (for CVD)    
Tube Sealing: O-Ring    
Manifold Heater: Yes    
Switch Valve for Manifold Cool: Yes    
Soft Backfill Injector: Yes    
Boat Type: 117 slots Ladder (8mm pitch)    
Boat Material: Quartz    
Boat Rotation: Yes    
Pedestal Type: Quartz    
Cap Heater:Yes    
Auto Shutter: No Shutter Purge Type    
Earthquake Countermeasure: Yes,OPT: Ordering Fab must verify seismic requirements and note any special requirements within
the PO.


3.5.1- Power Specification, Power dist System
Voltage 3phase: 480VAC
3phase connection type: Star Connection
Voltage Single-phase: 120VAC
Single-phase connection type: Grounded
Frequency: 60Hz 
Wattmeter: None
Control Power UPS provided by: Optional
Control Power UPS type:    Fab-wide system
UPS Input/Output Voltage:N/A

3.5.2- Power Specification, Cable Length
Power Cable Input Entrance Loc: Power Box Top
FNC - Power Box:20m
Power Box - RCU: N/A
Power Box - Pump Unit:20m
Power Box -Refill System (if u: 20m
Power Box - WVG CTRL Unit (if: N/A
FNC - WVG CTRL Unit (if used): N/A
Power Box -Scrubber System (if: N/A
Power Box - Ozone Delivery sys: 30m
Power Box - UPS (if used):N/A
Wiring by: Customer
Conduit/Raceways provided by:Customer

3.6.1- Interface Specification, Factory Automation System
Host Communications: Comply with GJG    
Equipment Host I/F Connection:Gas Box TOP HSMS (10Base-T/100Base-TX), OPT: Ordering Fab to verify  connection point as
follows:  QTY=1 is Bottom connection, QTY=2 is Top connection,  Default = 1, and note any special requirements within the
PO.
Ingenio:Yes, OPT: Ordering Fab must specify Ingenio included or not, default is Yes (QTY=1). Set QTY=0 if excluded
Group Controller Connection: Yes    
OHT Capability: Yes    
AGV Capability: None    
RGV Capability: None    
PGV Capability: None    
Load Port Operation: Upper    
PIO I/F Location: FNC Top    
PIO Provided by:TEL    
PIO Maker/Model: HOKUYO / DMS-HB1-Z series(Head-On)    
Carrier ID Reader Writer Type: RF    
CIDRW Lower Load Port: Read    
CIDRW Upper Load Port: Read    
CIDRW FIMS: Read/ Write,OPT: Ordering Fab must verify if Write or Read Write. Write only QTY= 1.Read/Write QTY= 2. Default
= 1 . Note any special requirements within the PO.
CIDRW Maker/Model:"Controller is V700-L22-6.
ID READER(HEAD) is V640-HAM11-V2.
ANTENNA is V640-HS61."    
CIDRW Provided by: TEL    
EEC (Equipment Engineering Cap:    FDC(Fault Detection and Classification)    "OPT: Ordering Fab must specify if FDC is included
or not, Include = QTY=1,  Set QTY= 0 if excluded.
Default = 1"
Customized Management Signals: PT / WATER    
"INTERFACE PT/WATER: Interface A Option    "OPT: Ordering Fab must specify Interface A included or not, Include = QTY=1,  Set
QTY= 0 if excluded.
Default = 0"

3.6.2- Interface Specification, User Interface
Signal Tower Model: LOUGWB-24-4,OPT: Ordering Fab to verify VAC  signal tower as follows:  QTY=1 is LOUGWB-24-4, QTY=2 is
LOUGWB-24-3, Defualt = 1 and note any special requirements within the PO.
Signal Tower Colors: Red/Yellow/Green/Blue, OPT: Ordering Fab to verify signal tower as follows:  QTY=1 is
Red/Yellow/Green/Blue , QTY=2 is Red/Yellow/Green, Defualt = 1 and note any special requirements within the PO.
Signal Tower Location: Front    
Front Operation Panel: Yes    
MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed    
Indicator Type: Superset    
Operator Switch: Operator Access/Orange (STD)    
Pressure Display Unit: MPa / Torr    
Cabinet Exh Pressure Display: Pa    
Warning Label: English    

3.7.1- Other Specification, Unit Location
Furnace (Exh/Box,Gas/Box inclu:Main-Fab
Power Box:Sub-Fab
Pump:Sub-Fab
RCU:N/A
Step Up Transformer:N/A
Step Down Transformer:N/A
Ozone Delivery System:Sub-Fab
WVG Controller:N/A
Auto-Refill System:Sub-Fab
UPS:None

3.7.2 -  Other Specification, Gas Leak Detector
Condenser:N/A
Gas Leak Detector:YES
Gas Leak Detector Provided By:TEL
Gas Leak Detector Maker:RiKen / GD-K77D-A
Gas Detector Power:Power is provided by Machine
Detected Gas 1 / Location:Optional
Detected Gas 2 / Location:N/A
Detected Gas 3 / Location:N/A
Detected Gas 4 / Location:N/A
Detected Gas 5 / Location:N/A
Detected Gas 6 / Location:N/A
Detected Gas 7 / Location:N/A
Furnace Detection Port:4 points (2 pairs)
Gas Box Detection Port:4 points (2 pairs)

4.0.1- Fixture List, Furnace
Tube Cart: 1 per 4 tools recommended
BACKDOOR REMOVAL FIXTURE:1 per 4 tools recommended
HEATER SET FIXTURE FIXTURE (SL:    3 per fab recommended
HEATER SET FIXTURE (RACK):3 per fab recommended
Mylar floor cutout template: Supplier to deliver 10 weeks prior to ODD

4.0.2- Fixture List, Auto Mechanism
FOUP DOOR OPENER ADJUSTMENT FI:    1 per 4 tools recommended
FIMS DOOR REMOVER:1 per 4 tools recommended
C/S TEACHING FIXTURE: 1 per 4 tools recommended
FORK GAUGE:1 per 4 tools recommended
FORK CLEARANCE CONFIRMATION FI:    1 per tool
BOAT ALIGNMENT FIXTURE (B/S):1 per 4 tools recommended - (Load Port Foup Teaching Fixture)

4.0.3 - Fixture List, Gas
IGS maintenance Jig: 1 per 4 tools recommended

4.0.4 - Fixture List, Interface Tool
HCT:HCT (Robot Cal. Terminal, Grip SW)= 1 per tool recommended
INTERCOM (INTERPHONE): 1 per 4 tools recommended

4.04 - Fixture List Reactor
INNER TUBE SET FIXTURE:1 per 4 tools recommended
Outer Tube Set Fixture: 1 per 4 tools recommended
SINGLE T/C: 1 per 4 tools recommended
PROTECTION TUBE FOR SINGLE T/C: 1 per 4 tools recommended
EXTENSION CABLE FOR SINGLE T/C: 1 per 4 tools recommended
AUTO PROFILE T/C: 1 per 4 tools recommended
PROTECTION TUBE FOR AUTO PROFI: 1 per 4 tools recommended
EXTENSION CABLE FOR AUTO PROFI: 1 per 4 tools recommended
TEMP MEASUREMENT FIXTURE (T/C: 1 per 4 tools recommended

Damage/Missing parts list
3DMAS baking unit:damage
FIMS1 latch cylinder air flow connector:missing
Port 2 ID reader:missing
Port 2 ID reader amplifiler unit:missing
Wafer transfer controller FAN2:missing
Please inspect tool to reconfirm