Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ushio UMA-2003

Asset ID: 13754

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UV Cure System

Resist Processing Equipment

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Model: UMA-2003-H120F-IM01

Process: 6500-35 GATE RESIST CURE

Tool config is based on original PO, please verify tool details at tool inspection

Basic System: UMA-2003-H120F UVC

Wafer Size: Capable of processing 300mm +/- 0.05mm (SEMI M28), 775 +/- 25um, notched wafers

Carrier: 2 FOUP (TDK TAS-300)

Interface: 2 FOUP (Continuous flow operation). With Semi compliant MENV and FIMS assemblies.

Carrier ID: Bar code

Communications Protocol: HSMS

EMO: Display and Main Unit (including attached Mini-environment) have front and back EMO, LAMP POWERSUPPLY UNIT FRONT SIDE

Interlocks: Power Supply Unit and Mini-environment have panel (cover) interlocks. Open lamp house

Cable Lengths: 15 meter cables run between the main unit and the Lamp Supply unit.

Signal Tower: Red/Yellow/Green

CL plate: Hp on the CL plate (with vacuum)

Detection sensor (port1, port2): The FOUP up and down a transmission sensor Installation



ROBOT Controller Unit

Bulk Gas: CDA Peak Flow=280, Ave Flow=5.4, Static pressure0.50.6M Pa

Bulk Gas: N2 FLOW10501/min, Static pressure0.50.6Mpa

Bulk Gas: Vacuum-80Kpa; Flow40L/Min

Electric: 200V±10V 3PH 50/60Hz 175A

Electric: 200V±10V 3PH 50/60Hz 33A

Water supply: Water supply Temperature1025; Flow: 6L/Min(over); Pressure0.50.6Mpa

Water supply: Water supply Temperature25(following); Flow60L/Min(over); Pressure0.1Mpa(over) 

Exhaust: Tool Exhaust6m3/min; Lamp cooling20m3/min; Lamp power supply Exhaust7m3/min"

Safety Codes: Comply to S2-1102 and CE marked.

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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