Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Novellus Systems Inc. GAMMA Express

Asset ID: 206134

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Novellus Systems Inc.

GAMMA Express

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 3/15/2021

11-3LAM_GXPR_STR_01


Tool config is based on original PO, please verify tool details at tool inspection


Tool system is upgraded to from GAMMA 2130 GAMMA Express


STANDARD SPECIFICATIONS

Software Revision : V4.20B10

Factory Automation: OHT PIO Sensor

Wafer Size: Diameter 300+/- 0.05mm

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 3 carrier stage (Continuous flow operation)

Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)

Platform Type: Version 2

UPS on system: Yes

Earth Leakage Breaker: Yes

Monitor: 2(Flat Panel Display Touch Screen Type, 2(QNS /WIN) ; Front, 1(WIN) ;back 

Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on 

maintenance side x1)"

EMO: Front x1, Rear x2

PM to Pump Interconnect: 50 ft

Power box for pump: MDP

Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)


Configuration Specifications

MF: Gamma 2130 upgread to xPR

Etch Chamber: Gamma 2130/ Position 1 to position 6

RF Cable Length: RFG to Matcher, 30 ft 

Generator: MKS GHW-50A, Max power 5000W + RF match COMET 5KW HI-THLD (XPR type)

chamber kit : Standard

Wafer Lift Mechanism : Fin

O-Rings : Fluorosilicon/TEV

Gate Valve: Barrier seal door

Gas System Type: 4 Gas Configuration

FOUP / ATM Robot / Backend: 3 FOUP / YASKAWA MP2300i controller / YASKAWA MP2300i controller

Factory Automation: OHT PIO Sensor

Cassette ID: Hermos Carrier ID

User Interface Options: Side and front Monitor UI

Interconnect Cables TM_Subpanel: TM to Subpanel, 100ft

Conditioning Station: Conditioning Station

Non Standard Feature: Standard

Gas 1: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522  O2/50 SLM

Gas 2: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522  N2/7 SLM

Gas 3: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522 4%H2N2/20SLM

Gas 4: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522 CF4/50 SCCM


Damage/Missing parts list

1.LP1 vacuum cap fault

2.lamp and lamp holder fault of ATM area

3.LP2 communication fail and open/close cylinder fault and present sensor abnormal

4.LP3 communication fail 

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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