Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Canon Surpass 320

Asset ID: 11145

Print spec sheet

Canon

Surpass 320

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Jul., 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

MISSING OR DAMAGED Fab15 confirmed there were no missing or damaged parts.

TOOL WAS UPGRADED FROM SURPASS 300 TO SURPASS 320.


Chamber A]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

H2/N2(2000),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300

Dielectric Substance:Al + Al2O3


[Chamber B]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

H2/N2(2000),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300

Dielectric Substance:Al + Al2O3


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.