Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

SEZ Group SP4300

Asset ID: 209749

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SEZ Group

SP4300

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2001

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Due to space factors, the equipment need to move out after destructive deinstallation.

Install Type is Stand-Alone.

Manufacturer Date is 2002

Date of last PM is 2014 MAY.

The system not On-Line  

SEZ Spin Processor Model is SP/4300

UI (Front) is present

Status Lamp is present

Chuck Size (Left) is 12

Chuck Size (Right) is 12

No Flip Module

No End Point Detection System

Horiba concentration Monitor (HF Monitor)

ULPA Filter (Top of Main Unit)

FFU Replacement Date is 2013 May

Robot Support Plate is Present

Robot - CNTRL Filter Replacement Date is 2013 May

No Suck Back Box w/NT flow meter & manual reset

Number of Load-ports is 4 std

Load-port Size (Left) is 12

Load-port Size (Right)  is 12

No Load-port Adapters (12->8)

No Wafer ID Reader

No RFID Reade

Chemical Module 1 is ST250

Chemical Delivery System (CDS) is ST250

No Buffer System for Chemical Cabinet

No Bulk Chem Delivery system (BCD)_Active

No Bulk Chem Delivery system (BCD)_Passive

All Cables are present 

The power box and robot are missing.

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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