Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

SEZ Group SP304

Asset ID: 209747

Print spec sheet

SEZ Group

SP304

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Need use the destructive methods to deinstallation the equipment.

The DC Power supply is missing and Heater is damaged.

Install Type is Stand-Alone.

Manufacturer Date is 2004

Date of last PM is 2014

The system not On-Line  

SEZ Spin Processor Model is SP304

UI (Front) is present

Status Lamp is present

Chuck Size (Left) is 12

Chuck Size (Right) is 12

Ionizer system

No Flip Module

No End Point Detection System

Horiba concentration Monitor (HF Monitor)

ULPA Filter (Top of Main Unit)

FFU Replacement Date is 2013

Robot Support Plate is Present

Robot - CNTRL Filter Replacement Date is 2013

Suck Back Box w/NT flow meter & manual reset

Number of Load-ports is 2 std

Load-port Size (Left) is 12

Load-port Size (Right)  is 12

No Load-port Adapters (12->8)

No Wafer ID Reader

No RFID Reade

Chemical Module 1 is SC1

Chemical Module 2 is HF 49%

Chemical Module 3 is H2SO4

Chemical Delivery System (CDS) is CDS

Buffer System for Chemical Cabinet

No Bulk Chem Delivery system (BCD)_Active

No Bulk Chem Delivery system (BCD)_Passive

All Cables are present 

There are missing or damaged parts

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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