Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Endura II Aluminum Interconnect
PVD (Physical Vapor Deposition)
Date of Manufacture: 2105
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: ENDURA2
Controller: GEN2
Software Version: CPCI B50140
System Power Rating: 208V AC 3-Phase +480V AC Noraml
Loading Configuration: 3 load ports
Chm/Unit Position 1: SIP; Gas: Ar/N2
Chm/Unit Position 2: ALPS; Gas: Ar/N2
Chm/Unit Position 3: Hot AL; Gas: Ar/N2
Chm/Unit Position 4: Hot AL; Gas: Ar/N2
Chm/Unit Position 5: SIP; Gas: Ar/N2
Chm/Unit Position C: PCXT; Gas: Ar/N2
Chm/Unit Position D: DSTTN; Gas: Ar/N2
Chm/Unit Position E: DMD Degas; Gas: Ar
Chm/Unit Position F: DMD Degas; Gas: Ar
Process Type: Reactive PC
Chamber position: C
Shutter option: none
chamber body (Al or SST): Al
chamber body part number: 0040-76718
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: n/a
Target No.: n/a
Bakeout/idle power (%): n/a
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): n/a
AMAT Part number Master: n/a
OEM Part Number Master: n/a
AMAT Part number Slave: n/a
OEM Part Number Slave: n/a
Generator Size : n/a
Total DC (12 kwh,24kwh, etc): n/a
Bias Generator : n/a
AMAT Part number : n/a
OEM Part Number: n/a
Bias Generator Size: n/a
Bias Generator Frequency: 13.56MHz and 2MHz(in one generator)
Rf coil generator: COMDEL CDX-2000
AMAT Part number : 0190-23308
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): n/a
Magnet shim thickness: n/a
Magnet type: n/a
Magnet part number: n/a
Magnet Serial Number (man. Date): n/a
Target to magnet spacing(mm): n/a
adaptor p/n: 0041-02659
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: Belljar 0040-55456
Treatment (Arc spray/Bead Blast): AL2O3
Treatment roughness (RA): n/a
lower shield p/n: 0040-86514
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
inner(or mid) shield p/n: 0021-19342
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
shield clamp p/n: 0020-19258
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: Insulator 0200-01903
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal type: n/a
pedestal p/n: n/a
heater spacing in mm: n/a
heater spacing in steps: n/a
min heater spacing in mm: n/a
min heater spacing in steps: n/a
max heater spacing in mm: n/a
max heater spacing in steps: n/a
Lift fingers p/n: n/a
Lift hoop p/n: n/a
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): n/a
Cryo gate valve (2/3 pos): Pendulum
MFC 1 Gas: He
MFC 1 Cal Factor: 1
MFC 1 Size: 300
MFC 1 Type: He
MFC 1 Part Number: 0010-44160
MFC 2 Gas: Ar2
MFC 2 Cal Factor: 1
MFC 2 Size: 200
MFC 2 Type: Ar
MFC 2 Part Number: 3030-13113
MFC 3 Gas: Ar
MFC 3 Cal Factor: 1
MFC 3 Size: 20
MFC 3 Type: Ar
MFC 3 Part Number: 3030-13116
MFC 4 Gas: (MFC6) H2
MFC 4 Cal Factor: (MFC6) 1
MFC 4 Size: (MFC6) 100
MFC 4 Type: (MFC6) H2
MFC 4 Part Number: (MFC6) 0015-02990
Chamber base pressure (T): 0.0000002
Chamber Rate-of-Rise(nTorr/min): 15000
Press. and ROR at Startup: not necessary
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 34.7
Process N2 Supply Pressure: 33.9
Cryo Regen N2 pressure: na
Vent Ar pressure: 47.7
Optional Gas (He): 30.1
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 95.7
SLIT VALVE CDA: 85
Cooling Water Flow (GPM): 0.8
Process Type: SIP Ti
Chamber position: 1,5
Shutter option: yes
chamber body (Al or SST): SST
chamber body part number: 0040-98657
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko/Tosoh
Target No.: TAG73
Bakeout/idle power (%): 0.4
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): AE-Pinnacle
AMAT Part number Master: 0190-08122
OEM Part Number Master: n/a
AMAT Part number Slave: 0190-08122
OEM Part Number Slave: n/a
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 40kw
Bias Generator : ENI - GHW12Z
AMAT Part number : 0190-25529
OEM Part Number: n/a
Bias Generator Size: 1.25KW
Bias Generator Frequency: 13.56MHZ,
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): 65
Magnet shim thickness: Ch1:1.25mm Ch5:1.0mm
Magnet type: LP-3.7.4
Magnet part number: 0010-11228
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.5±0.6
adaptor p/n: 0040-82921
Kit spacer upper p/n: 0040-76943
Kit spacer lower p/n: 0040-62877
upper shield p/n: 0020-23549
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): n/a
lower shield p/n: 0020-02344
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): n/a
inner(or mid) shield p/n: 0020-54777
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: 0020-08299
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): n/a
lower shield clamp p/n: 0020-02348
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: 0200-08301
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: 0021-17770
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): n/a
insulator bushing p/n: 0200-00590
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: 0021-25014
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
pedestal type: SLT FDR ECHUCK
pedestal p/n: 0010-22985
heater spacing in mm: no concern
heater spacing in steps: -55050
min heater spacing in mm: No Data
min heater spacing in steps: No Data
max heater spacing in mm: No Data
max heater spacing in steps: No Data
Lift fingers p/n: no concern
Lift hoop p/n: no concern
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): 400
Cryo gate valve (2/3 pos): 3 Position
MFC 1 Gas: N2
MFC 1 Cal Factor: n/a
MFC 1 Size: 50
MFC 1 Type: N2
MFC 1 Part Number: na
MFC 2 Gas: na
MFC 2 Cal Factor: n/a
MFC 2 Size: na
MFC 2 Type: na
MFC 2 Part Number: na
MFC 3 Gas: Ar
MFC 3 Cal Factor: n/a
MFC 3 Size: 50
MFC 3 Type: Ar
MFC 3 Part Number: na
MFC 4 Gas: ArH
MFC 4 Cal Factor: n/a
MFC 4 Size: 10
MFC 4 Type: n/a
MFC 4 Part Number: n/a
Chamber base pressure (T): 2.0 e-8
Chamber Rate-of-Rise(nTorr/min): 522
Press. and ROR at Startup: no concern
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 30psi
Process N2 Supply Pressure: 30psi
Cryo Regen N2 pressure: 90
Vent Ar pressure: 40
Optional Gas (He): n/a
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 88
SLIT VALVE CDA: 82
Cooling Water Flow (GPM): 8.9
Process Type: ALPS
Chamber position: 2
Shutter option: yes
chamber body (Al or SST): SST
chamber body part number: 0040-98657
Slit valve seal (bonded or o-ring): bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko
Target No.: TAG86
Bakeout/idle power (%): n/a
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): ENI DCG-200Z OPTIMA
"AMAT Part number Master: 0190-22932-002 (40kw)
-> 0190-26920 (20kw)"
OEM Part Number Master: n/a
"AMAT Part number Slave: 0190-22918-002
->0190-28664 (20kw)"
OEM Part Number Slave: n/a
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 40kw
Bias Generator : ENI GHW-12Z
AMAT Part number : 0190-25529
OEM Part Number: na
Bias Generator Size: 1250w
Bias Generator Frequency: 13.56 Mhz
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): 65
Magnet shim thickness: na
Magnet type: LP3.2.0
Magnet part number: 0010-26093
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.5mm
adaptor p/n: no data
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: Dark Space Shield 0020-41709
Treatment (Arc spray/Bead Blast): AS
Treatment roughness (RA): n/a
lower shield p/n: 0021-07952
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
inner(or mid) shield p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
shield clamp p/n: na
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield clamp p/n: 0020-83315
Treatment (Arc spray/Bead Blast): 0200-06863
Treatment roughness (RA): 0200-06864
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: 0200-06863
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: 0200-06864
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: 0021-26565
Treatment (Arc spray/Bead Blast): AS
Treatment roughness (RA): n/a
pedestal type: SLT ESC
pedestal p/n: 0010-22985
heater spacing in mm: no data
heater spacing in steps: -55050
min heater spacing in mm: No Data
min heater spacing in steps: No Data
max heater spacing in mm: No Data
max heater spacing in steps: No Data
Lift fingers p/n: no data
Lift hoop p/n: no data
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): na
Cryo gate valve (2/3 pos): 3 Position
MFC 1 Gas: AR
MFC 1 Cal Factor: n/a
MFC 1 Size: 100
MFC 1 Type: AR
MFC 1 Part Number: na
MFC 2 Gas: na
MFC 2 Cal Factor: n/a
MFC 2 Size: na
MFC 2 Type: na
MFC 2 Part Number: na
MFC 3 Gas: ArH
MFC 3 Cal Factor: n/a
MFC 3 Size: 20
MFC 3 Type: n/a
MFC 3 Part Number: n/a
MFC 4 Gas: n/a
MFC 4 Cal Factor: n/a
MFC 4 Size: n/a
MFC 4 Type: n/a
MFC 4 Part Number: n/a
Chamber base pressure (T): 2.0 e-8
Chamber Rate-of-Rise(nTorr/min): 522
Press. and ROR at Startup: no concern
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 30psi
Process N2 Supply Pressure: 30
Cryo Regen N2 pressure: 90
Vent Ar pressure: 40
Optional Gas (He): na
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 88
SLIT VALVE CDA: 82
Cooling Water Flow (GPM): 8.9
Process Type: HT Al
Chamber position: 3,4
Shutter option: yes
chamber body (Al or SST): SST
chamber body part number: 0040-98657
Slit valve seal (bonded or o-ring): bonded
Slit Valve door part number: 0040-84391
Target vendor: Tosoh
Target No.: TAG113
Bakeout/idle power (%): n/a
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): AE Pinnacle
AMAT Part number Master: 0190-25689-001
OEM Part Number Master: 3152412-243C
AMAT Part number Slave: 0190-25689-001
OEM Part Number Slave: 3152412-243C
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 40kw
Bias Generator : n/a
AMAT Part number : n/a
OEM Part Number: n/a
Bias Generator Size: n/a
Bias Generator Frequency: n/a
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): 95
Magnet shim thickness: Ch3:0.5mm Ch4:0.5mm
Magnet type: WP
Magnet part number: 0010-03485
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.1mm
adaptor p/n: 0040-69768
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: 0021-24752
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
lower shield p/n: 0020-29711
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
inner(or mid) shield p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: 0200-07118
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: 0200-06864
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: 0021-26565
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
pedestal type: HT ECHUCK
pedestal p/n: 0010-27430
heater spacing in mm: No Data
heater spacing in steps: Ch3:-52840 Ch4:-52840
min heater spacing in mm: No Data
min heater spacing in steps: No Data
max heater spacing in mm: No Data
max heater spacing in steps: No Data
Lift fingers p/n: 0020-46828
Lift hoop p/n: 0020-75465
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): 980
Cryo gate valve (2/3 pos): 3 Positon
MFC 1 Gas: n/a
MFC 1 Cal Factor: n/a
MFC 1 Size: n/a
MFC 1 Type: n/a
MFC 1 Part Number: n/a
MFC 2 Gas: n/a
MFC 2 Cal Factor: n/a
MFC 2 Size: n/a
MFC 2 Type: n/a
MFC 2 Part Number: n/a
MFC 3 Gas: Ar
MFC 3 Cal Factor: 1
MFC 3 Size: 200
MFC 3 Type: AE
MFC 3 Part Number: 0015-02988
MFC 4 Gas: ArH
MFC 4 Cal Factor: 1
MFC 4 Size: 20
MFC 4 Type: Ar
MFC 4 Part Number: AE 0015-02990
Chamber base pressure (T): 5.00E-8 Torr
Chamber Rate-of-Rise(nTorr/min): 5000nTorr/min
Press. and ROR at Startup: Ch2 Press:1.30E-8Torr ROR:1100nT/min Ch3 Press:2.0E-8Torr ROR:947nT/min
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 30psi
Process N2 Supply Pressure: 93.5
Cryo Regen N2 pressure: 47.7
Vent Ar pressure: 37.9
Optional Gas (He): n/a
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): 95.7
CDA: 85
SLIT VALVE CDA: 86
Cooling Water Flow (GPM): CH2:8.5 CH3:9.0
Process Type: RT DSTTN
Chamber position: D
Shutter option: yes
chamber body (Al or SST): SST
chamber body part number: 0242-33289
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko/Tosoh
Target No.: TAG72
Bakeout/idle power (%): 0
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): ENI
AMAT Part number Master: 0190-22931
OEM Part Number Master: DCG200Z
AMAT Part number Slave: n/a
OEM Part Number Slave: n/a
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 20kw
Bias Generator : n/a
AMAT Part number : n/a
OEM Part Number: n/a
Bias Generator Size: n/a
Bias Generator Frequency: n/a
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): 95
Magnet shim thickness: na
Magnet type: TTN
Magnet part number: 0010-03487
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.1mm
adaptor p/n: 0040-69768
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: 0021-21234
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
lower shield p/n: 0021-22065
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: 0040-07291
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: 0021-22064
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: 0021-26609
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal type: ADVANCED A101
pedestal p/n: 0010-27432
heater spacing in mm: 55mm
heater spacing in steps: -51000
min heater spacing in mm: 32
min heater spacing in steps: -69000
max heater spacing in mm: 55
max heater spacing in steps: -51000
Lift fingers p/n: na
Lift hoop p/n: na
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): na
Cryo gate valve (2/3 pos): 3 Positon
MFC 1 Gas: N2 process
MFC 1 Cal Factor: 0
MFC 1 Size: 200
MFC 1 Type: N2
MFC 1 Part Number: 0015-02992
MFC 2 Gas: none
MFC 2 Cal Factor: n/a
MFC 2 Size: na
MFC 2 Type: na
MFC 2 Part Number: na
MFC 3 Gas: Ar process
MFC 3 Cal Factor: 0
MFC 3 Size: 150
MFC 3 Type: Ar
MFC 3 Part Number: 0015-02992
MFC 4 Gas: n/a
MFC 4 Cal Factor: n/a
MFC 4 Size: n/a
MFC 4 Type: n/a
MFC 4 Part Number: n/a
Chamber base pressure (T): 3-E8
Chamber Rate-of-Rise(nTorr/min): 650
Press. and ROR at Startup: na
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 34.7
Process N2 Supply Pressure: 33.9
Cryo Regen N2 pressure: na
Vent Ar pressure: 47.7
Optional Gas (He): 37.9
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 95.7
SLIT VALVE CDA: 85
Cooling Water Flow (GPM): 11.2
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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