Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

LAM Research 2300 Versys KIYO Poly

Asset ID: 204453

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LAM Research

2300 Versys KIYO Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Process: POLYETCH


Tool config is based on original PO, please verify tool details at tool inspection


FI SN: 1017439-10-38-0839


System Type Complete System 1

2300 Version 2 (4 VPM) V2 platform supports up to 4 process chambers. 1

Wafer Size 300 mm wafers 1

Wafer Config SEMI 1

Cassette Type 25 Slot Cassette 1

Process Module Position and Quantity 2300 Versys Kiyo (PM1,2,3,4) 4

Gas Box Type IGS Gas Box 4

Chamber Type Versys Kiyo 4

Chamber Pinnacle Standard Pinnacle (-814) 4

Wafer Clamping Mechanism Center RF, Tunable ESC (-374) 4

RF Strap RF Coupling Strap 4

RF Ground Bracket Standard Fingers (-006) 4

Edge Ring Quartz (EBP) 4

Injector Alt 1 Injector (-026) 4

Injector Shield Standard Injector Shield 4

Plasma Screen Enhanced (-035) 4

Gas Weldment Original (-103) 4

ESC Hose Kit Low Temp 4

ESC Facility Plate Compression Facility Plate 4

Liner ACME Coated Universal (-838) 4

Chamber Manometer Standard 4

Wafer Lift Mechanism Prime Movers 4

Voltage Control Interface 1200V 4

O-rings Chemraz 4

TCP Coil Standard 4

TCP Source Dual 1500W 4

300MM Turbo Pump 2200 L/s BOCE (Seiko Seiki) 4

Heated Foreline Heated 4

Heated Foreline Clamp Covers Yes 4

Endpoint Detection OES2 4

Chamber Viewport Window Standard 4

Chamber Isolation Valve Barrier Seal Door 4

Vacuum Valve Viton 4

Water Control Passive RF PCW Control 4

Service Covers Standard 4

TCU to PM 50ft (Default) 4

Pump to PM 100ft 4

Facilitization No Gas Interface Box 0

Future PM Position 1, 2, 3, 4 0

Gas System Exhaust Top Exhaust 4

Gas Line 16 Gas Configuration 4

Heated Gas Lines Heated Lines, Pos 1 & 2 4

Gas Line 1 SiCL4 100 sccm - STEC Z313 4

Gas Line 2 CL2 500 sccm - STEC D213 4

Gas Line 3 HBr 500 sccm - STEC D213 4

Gas Line 4 CF4 400 sccm - STEC D213 4

Gas Line 5 O2 500 sccm -STEC D213 4

Gas Line 6 He 500 sccm - STEC Z313 4

Gas Line 7 CH2F2 200 sccm - STEC D213 4

Gas Line 8 Ar 1000 sccm - STEC D213 4

Gas Line 9 HeO2 (30% O2) 50 sccm - STEC Z313 4

Gas Line 10 NF3 1000 sccm - STEC D213 4

Gas Line 11 N2 (Process Grade) 250 sccm - STEC Z313 4

Gas Line 12 SO2 200 sccm - STEC Z313 4

Gas Line 13 NA 0

Gas Line 14 NA 0

Gas Line 15 NA 0

Gas Line 16 NA 0

Gas Box Inlet Option Regulated Inlet Gas Panel 1

ATM Front End Load Port 3 FOUP BROOKS 4

ATM Cassette ID Hermos Carrier ID 4

ATM, Factory Automation OHT PIO Sensor 4

ATM Input Buffer Station 25 Slot 2

ATM, CTC Computer, Storage Hard Disk Drive - Mirrored 1

VTM Loadlock A Standard 1

VTM Loadlock B Standard 1

Subpanel RPDB 1

Signal Tower R-O-G-B Signal Tower 1

PM Peripherals: Backing Pumps ESR100WN 4 Ebara

RPDB: Backing Pump CB Sizes 30A 4

TCU Config YR-8020 4 Maruyama

RPDB: TCU CB Sizes 30A 4

Critical Parts PCB,VIOP BOARD 4 810-099175-011

Critical Parts VME 7668A CPU board 4 605-109114-001 

Critical Parts ASSY,ENCL,DC CONT 4 853-800087-405

Critical Parts ASSY,ENCL,AC,2300 PM 4 853-800083-346

Critical Parts WDO, GAS, INJ, F SEAL, QRTZ, NSG 4 716-012640-013

Critical Parts Top Chamber ACME Coated 4 715-027638-814

Critical Parts ESC,TUNABLE,COUL,CNTR RF,300MM 4 839-019090-374

Critical Parts PCBA,ESC FILTER, BICEP Q 4 810-495659-304

Critical Parts FRU,ASSY,BIAS MTCH,2300 4 832-038915-001

Critical Parts CA,COAX,RF,HN-90,TO,HN-90,11FT 4 834-036619-011

Critical Parts GEN,APEX,1.5KW,13.56MHz, F47,H,P4,-2000Hz 4 660-032596-214

Critical Parts COUPLER,RF,ESC,BIAS COAX FEED 4 839-046079-002

Critical Parts BRKT,RF GND,BIAS ELECT ASSY 4 715-039685-006

Critical Parts WDO, SAPPHIRE, 25MMX.087 4 716-008608-001

Critical Parts SLV,GND SHLD,TCP GAS INJ,NO Ni 4 715-016744-016

Critical Parts SCRN,PLASMA,DUAL GAS ZONE.2300 4 713-012641-035

Critical Parts Gas Injector Weldment : Stainless 4 839-031197-103

Critical Parts HOSE,DUAL INSUL,ESC TEMP CTRL,RET-SUP 4 839-028991-001

Critical Parts "LIN, 2300, UPR CHMB, COATED

(chamber liner)" 4 715-801021-838

Critical Parts LIN, MTG PL, ESC, 300MM 4 714-801511-002

Critical Parts HSG,BIAS ELCTD,300MM (ESC toilet bowl) 4 715-800326-004

Critical Parts MNMTR,ETCH,100MT (MKS 100mT manometer) 4 796-019591-004

Critical Parts MNMTR,2STPT,100 DEG C,KF16,10T (MKS 10Torr manometer) 4 685-097330-006

Critical Parts PIN,FLEX,300MM PIN LFT,.042 (lift pins) 4 715-800621-003

Critical Parts FTG,TUBE,FIXED ORF,CHK VLV,AIR,SMC (pin speed mod) 4 920-058481-002

Critical Parts ACTR,BLWS.PINLIFT,.395 STROKE, 4 790-022848-114

Critical Parts "ASSY,VOLTAGE DETECTOR,ESC,2300

Z1SY,VOLTAGE/DET,ESC,2300,10-8" 4 853-002499-007

Critical Parts ASSY, S/G COIL, 1.5T OUT, 2T IN 4 853-031436-103

Critical Parts GEN,APEX,1.5KW,13.56MHz, F47,H,P4+2000Hz 4 660-032596-213

Critical Parts FRU,ASSY.ENCL.TCP MTCH,KIYO 23 4 832-034908-009

Critical Parts CA,COAX,RF,HN-90,TO,HN-90,18FT 4 834-036619-018

Critical Parts PMP,TURBO,2.2K L/S,ISO 250-F,T 4 796-900373-003

Critical Parts KIT,HEATERS,FORELINE, SEIKO 2200,IGS 4 857-000178-015

Critical Parts SPEC. OES2, ENDPOINT, VS70-S98 4 685-069171-002

Critical Parts WDO,QUARTZ 4 716-027740-001

Critical Parts KIT,PM, VAT RKR VLV INSTALL 4 857-083111-005

Critical Parts KIT,PM DR, VAT RCKR VLV,BARRIER 4 857-083115-001

Critical Parts GTV,CONT,250 MM FLG,SER 65,VAL 4 796-901160-009

Critical Parts O-RING, ARMOR CRYSTAL, 10.484 ID X .139W 4 734-112249-275

Critical Parts XDCR.PRESS,-15 TO 235 PSIG,T3,NO DISPLAY 4 771-036638-003


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps not included on sales

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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