Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Applied Materials (AMAT) Reflexion LK - Poly/STI


The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.

Asset ID: 206026

Enquire about this product Print spec sheet

Applied Materials (AMAT)

Reflexion LK - Poly/STI


CMP Equipment

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Currently Configured for 300mm wafer size

MFG Date: 2005


Tool Status: Deinstalled and moved to the warehouse.

Configuration: Audit to verify.


OEM                                 AMAT

Tool Model                      Reflexion LK

Process                             POLY

Software Version            lp384.8_52

                                           208v 3 Ø 60Hz

Loading Configuration    3 load ports (TDK)

System Configuration Description:

1 Polisher – 3 platens

2 Polisher – 4 carriers (contour)

3 Polisher – 8 UPAs (G4+)

4 Polisher – P1 slurry controllers: 50-500ml/min (x2)

5 Polisher – P2 slurry controllers: 50-500ml/min (x2)

6 Polisher – P3 slurry controllers: 50-500ml/min (x2)

7 Cleaner – Running Beam

8 Cleaner – Input, Buffer, Megasonics, Brush Box 1, Brush Box 2, Dryer (Desica – Marangoni)

Missing Parts:

Description                                                                                                Missing (qty)

ASSY, POLISHER DC POWER SUPPLY (AMAT: 0010-63313)                          1

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.