Equipment details:
Date of Manufacture: TBD
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 12/3/2021
Basic System : F11 SAXC003
Technology: DCVD
Platform Type: Producer GT
System Software:
System software: B5.4_135
FiCGUI: fB5.20_11
GP: 8.10.21.2
DTauMacros: 9.2.44.0
Mainframe Configuration:
Robot type: 0190-37624
Robot Blades: 0200-08347
LL preheater: 0090-05793
slit valve door: 3870-05037
MF pump: GX600N(EDWARDS)
LL pump: EPX180L（EDWARDS）
Diffucer: 0190-37371
FCVD Chamber Configuration:
Chamber Type: FCVD CHA/C
Blocker: N/A
Liner: 1 Piece
Pedestal: 0010-42919
Slit Valve: 3870-05037(KALREZ 9100)
Filter: N/A
Foreline: 6in
Foreline TV: 3870-06440
Foreline ISO: 3870-06045
Gas box: N/A
Dome: 0041-26595
Baffle : 0021-84368
FACEPLATE: 0041-35370
BLOCKER(gas feed block): 0041-07625
PUMPING LINER: 0021-64960
LINER CERAMIC TOP: 0021-82788
LINER CERAMIC MIDDLE: N/A
LINER CERAMIC BOTTOM(edge ring): 0021-85102
CERAMIC ISOLATOR: N/A
LIFT PINS, FLOATING: 0200-08020
LIFT HOOP: 0200-08334
RPS: 0190-40602
Gas Pallet Type: ETERNA FCVD GT Twin Pallet
Gas Box Configuration:
Line 1: N2 PURGE
Line 2: NF3 - 10.0SLM
Line 3: AR - 10.0SLM
Line 4: O2 - 250SCCM
Line 5: O2 - 2.5SLM
Line 6: N2 PURGE
Line 7: TSA - 1.0SLM
Line 8: HE - 5.0SLM
Line 9: EMPTY
Line 10: N2 PURGE
Line 11: NH3 - 700SCCM
Line 12: NH3 - 700SCCM
Line 13: EMPTY
Line 14: H2O - 1.0G
Line 15: AR - 5.0SLM
Line 16: EMPTY
Line 17: EMPTY
Line 18: EMPTY
Line 19: EMPTY
Line 20: EMPTY
Line 21: EMPTY
Line 22: N2 PURGE
UV Chamber Configuration:
Chamber Type: UV Hybrid
LAMPHEAD ASSEMBLY (DUAL): 0190-46008
INNER PRIMARY REFLECTORS (x2): 0200-09730
OUTER PRIMARY REFLECTORS (x2): 0200-09728
UV BULBS (MERCURY BULB x2): 0195-04092
LAMPHEAD ENCLOSURE SEAL: 0021-28691
LAMPHEAD TRAY: 0021-44280
LAMPHEAD TRAY MOUNTING SEAL: 0021-32043
PULLEY ASSEMBLY (ROTATING WHEEL): 0010-44199
LOWER DYNAMIC SEAL: 0190-31840
LOWER CLAMP RING: 0021-33232
SECONDARY REFLECTOR ASSEMBLY: 0041-43990
HOME SENSOR (SIDE 1 ONLY): 0150-18683
HOUSING: 0041-08307
UPPER WINDOW CLAMP SIDE 1: 0041-44565
UPPER WINDOW CLAMP SIDE 2: 0041-44968
QUARTZ WINDOW: 0200-05371 Hereaus (CIP Quartz)
LOWER WINDOW CLAMP: 0041-44966
UPPER SHOWER HEAD: 0200-13516 Hereaus (CIP Quartz)
INTERMEDIATE SHOWER HEAD CLAMP: 0041-44967
LOWER SHOWER HEAD: 0200-13481 Hereaus (CIP Quartz)
LOWER SHOWER HEAD CLAMP: 0021-94083
RF DETECTOR: 0195-06361
LAMPHEAD ROTATOR: 3970-00044
CERAMIC TOP LINER : 0200-10913
INNER PUMPING LINER : 0200-10914
OUTER PUMPING LINER: 0200-10912
ALUMINUM FILLER: 0021-84795
CERAMIC MIDDLE LINER : 0200-13152
CERAMIC BOTTOM LINER : 0200-10944
LIFT PIN (Big foot): 0200-06110
WEIGHT (Big foot): 0200-05795
Ceramic Cap: 0200-05307
WASHER, WAVE, HAYNES: 0021-27777
EQUALIZATION PORT LINER: 0021-94377
PUMPING CHANNEL HUB: 0041-36422
PEDASTAL: 0041-33505
SLIT VALVE DOOR: 0246-18185(Chemraz XPE)
RPS: 0190-40602
UV POWER SUPPER: 0190-44835
Foreline pipeing size: 4''
Foreline TV / ISO COMBO VALVE: 0190-42409
Gas Pallet Type: BIMINI, YAD4, 7STK, REG, PROD GT
Gas Box Configuration:
Line 1: Purge N2
Line 2: NF3, 5slm
Line 3: AR_CLN, 5slm
Line 4: NA
Line 5: AR_TOP, 35slm
Line 6: NA
Line 7: NA
Line 8: NA
Line 9: O3 DIVERT
Line 10: O3, 30slm
Line 11: AR_BTM, 10slm
Line 12: AR_SH, 2slm
Line 13: NA
Line 14: NA
Line 15: NA
Line 16: NA
Line 17: NA
Line 18: NA
Line 19: NA
Line 20: NA
Line 21: NA
Line 22: NA
Heat exchanger:
Heat exchanger 1: 0190-27732
Heat exchanger 2: 0190-27732
Heat exchanger 3 (For UV): 0190-32036
Ozone system:
O3 Generator: 0190-44053
O3 Controller: 0195-08806
Process Pump/Abatement:
Pump CHA/C: iXH4550HT
Pump CHB: iXH1820
Scrubber: DAS ESCAPE DUO
Missing/Damaged Parts List:
None report, please inspect tool to reconfirm
