Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: FRE_HAS
Software Version: B5.4_135
System Power Rating: 208 AC 3-Phase
Loading Configuration: 4 SELOP 7 25 WAFER FOUP (LOADPORT)
Server type: x306m Windows server 2003
Chm Position 1: PE SILANE GT TWIN CHM A; Chemicals/ Gases Used: SiH4_HI, SiH4_LO, NH3_LO, NH3_HI, TMS, N2, HE_HI, NF3, AR_CLN, AR, N2O_LO, N2O_HI, O2, HE_LO
Chm Position 2: PE SILANE GT TWIN CHM B; Chemicals/ Gases Used: SiH4_HI, SiH4_LO, NH3_LO, NH3_HI, TMS, N2, HE_HI, NF3, AR_CLN, AR, N2O_LO, N2O_HI, O2, HE_LO
Chm Position 3: PE SILANE GT TWIN CHM C; Chemicals/ Gases Used: SiH4_HI, SiH4_LO, NH3_LO, NH3_HI, TMS, N2, HE_HI, NF3, AR_CLN, AR, N2O_LO, N2O_HI, O2, HE_LO
Basic System
Technology: DCVD
Platform Type: PRODUCER GT
System Software
System software: B5.4_135
FiCGUI: fB5.20_11
GP: 8.10.21.2
DTauMacros: 9.2.44.0
Mainframe Configuration
Robot type: 0190-37624
Robot Blades: Twin blade wafer Transfer robot(FX) 0200-08347
LL preheater: 0090-04659
slit valve door: 9992-00594
MF pump: IGX600L(edwards)
LL pump: (EPX 180 TWIN DRY VACCUM PUMP)3620-00517
FI aligner : YES
Diffucer: (FV50D XL CHAMBERGARD,FAST)0190-37371
Chamber Configuration
Chamber Type: Fresco
Blocker: 0020-70842
Liner: 3 piece
RF Generator 1 (HF): APEX 3013 0920-00139
RF Generator 2 (LF): 0223-00352
"Heater: HA-12 TIGHT RF MESH WITH CLAMP
0010-36738"
Slit Valve: 9992-00594
Rf Filter: 0090-05831
Foreline: 2 inch
Foreline TV: (DNET, KF50 F/W 1.07 HIGH SPD, KALREZ 808)0190-19203
Foreline ISO: (VALVE PNEU BLWS ANGLE N/C KF-50 KALREZ 9)3870-05335
Gas box: 0041-28308(bypass type)
FACEPLATE: 0020-84596
BLOCKER: 0020-70842
PUMPING LINER side1: 0200-02407
PUMPING LINER side2: 0200-02408
LINER CERAMIC TOP: 0200-04654
LINER CERAMIC MIDDLE: 0200-02396
LINER CERAMIC BOTTOM: 0200-02397
CERAMIC ISOLATOR: 0200-04235
LIFT PINS, FLOATING(BIG FOOT): (LIFT PIN, FIXED FLOATING, 300MM)0200-06840
LIFT HOOP: 0200-08334
Spacer Side 1: 0021-24181
Spacer Side 2: 0021-24182
RPS: 0190-41326
Gas Pallet Type: Surface mount
Gas Box Configuration
Line 1: SIH4 - 800SCCM
Line 2: SIH4 - 300SCCM
Line 3: NH3_LO - 500SCCM
Line 4: NH3_HI - 4.0SLM
Line 5: TMS - 200SCCM
Line 6: NF3 - 5.0SLM
Line 7: EMPTY
Line 8: AR_CLN - 10.0SLM
Line 9: 02 - 2.0 SLM
Line 10: N2 - 25.0SLM
Line 11: HE_HI - 15.0SLM
Line 12: AR - 8.0 SLM
Line 13: N2O_LO - 2.0 SLM
Line 14: N2O_HI - 15.O SLM
Line 15: HE_LO - 5.0 SLM
Line 16: EMPTY
Line 17: N2 PURGE01
Line 18: N2 PURGE02
Line 19: EMPTY
Line 20: EMPTY
Line 21: EMPTY
Line 22: EMPTY
Damage/Missing parts list
Process Vacuum Pump: Kashiyama SD1203B(Qty:3)
Buffer pump:Edwards IH600L(Qty:1)
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
