Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Applied Materials (AMAT) Centura AP Ultima X

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Asset ID: 16078

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Applied Materials (AMAT)

Centura AP Ultima X

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Tool is currently in service in a clean room.

Compurter    
Front End:306M    
FI:306M    
RT:7326
    
Software 
C300:B4.4_75
CGA:T1.38_23    
            
FI     
robot *2:Kawasaky    
controller*2        
Aligner:YES    
passthru:8 pcs    
Neno:YES    
Load pod:TDK / barcode    
            
Buffer     
Robot:VHP    
blade: ceramic    
LCF:YES    
I pump:    A 100 L    
L/L driver:panasonic    
            
Chamber    A/B/C    USG/STI    
Gas ring:36hole    
Gas line:13stick (AR-side/O2/NF3-side/H2/SIH4/He-side/He-Top/H2-Top/SIH4-Top/AR-Top/NF3-Top/NF3/AR-CLN)
RPS:EMI    
Turbo:3603,original
Turbo controll: SHIMADZU    
Turbo T.V:long, Dnet CDN-127
Gate valve:NC-CAL    
Gauge:0.1 torr    
Endpoint:NO    
driver function:YES    
Bias GEN: 0190-17877    
Top GEN    0190-22201    
Side GEN: 0190-22201

Missing/Damage Parts: None reported, please reconfirm at tool inspection
 

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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