Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Telius SP-305 SCCM

Asset ID: 10978

Print spec sheet

Tokyo Electron Ltd. (TEL)

Telius SP-305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: OX


Standard Specifications

Software Revision: Linux 5.75 Rev 001

Lot Stability Dummy SW: Software for running lot stability wafer.

OEE WPH Software: Yes

GEM SEC Revision: TBD

Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant

MENV and FIMS assemblies

Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)

Interface A: Yes

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Loader Mod Corrosion Prevent: NO, without Corrosion Prevent

Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)

Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)

Load Lock Pressure Monitor: CM : 626A01TDE (MKS)

Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)

Water Leak Detector: 5 (LM;1, each PS;1)

Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 &

Upper right section of loader on maintenance side x1)

Data Back up: USB& MO

EMO: Front x3, Rear x6

Cable Length: One 15m and one 16m (Interconnection, RF cables)

Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)

Fittings: No brass fittings


Supporting Remote Units

Chiller: UBRPD5A-2T?

Coolant: Lower:FC3283, Upper:FC40

Chiller Hose: BRINE HOSE 15/14M

Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A

RF Generator TOP: AGA-50B2

RF Matcher TOP: AMN-50B2

RF Generator Bottom: WGA-50E

Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)

Pen Record Box: 2L80-00212-12

Loader Module: SELME2112ZS22-AD5

LOAD PORT: NO, Bolts-L type

DRIVE UNIT:SBX92102928

READER OPTICAL: ISS-1700-1TELCC

Carrier ID Reader: NO,V640series+V700-L22 (Omron)

APC: 12 INCH (320MM)


Hardware Configuration

Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating

Chamber hardware: FCC

Endpoint type: SE2000ii

ESC type: Ceramics ESCwith STD Vpp

Focus ring: 3.4mm

Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins

Polished focus ring: O

FC lower insulator: FC lower insulator w/quartz upper ring shield

Magnet Shield: O

Oring for Chbr Body-Depos: Armorcrystal, Chemraz SC657

CEL Body ASSY: Brine Control Mode

TMP: TMP-3403LMC-T4(VG300) (SHIMADZU)

TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)

Dry Pump: ESR80WN, KEG approved

Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)

Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)

APC: Pendulum Motion Dia., 320mm(VAT), R.T.~90deg

Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa

Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa

Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa

Pressure Monitor: N,41A13DGA2AA040 (MKS), no process impact

Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas


Gas Box Configuration

Gas line 1- N2 1000 sccm-AERA FCD985CT-BF

Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF

Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF

Gas line 4- O2 50 sccm-AERA FC-D985CT-BF

Gas line 5- CH2F2 30 sccm-AERA FC-D985CT-BF

Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF

Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF

Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF

Gas line 9- C3F8 50 sccms-AERA FC-D985CT-BF

Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF

Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF

Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF

Purge: N2 (Process Grade N2)

Filter: CNF1004USG4 (Nihon Pall)

Regulator: SQMICRO (VERIFLO)

Filter (N2): CNF1004USG4 (Nihon Pall)

Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)

Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)

Piping: Dual Piping (for Gas leak containment, Gas box to Final valve &

Exhaust through Gas box)

Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)

Final Pressure Switch: 51A (MKS)

Pressure Gauge: Bourdon

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