Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) Telius 305 SCCM


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Asset ID: 10209

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Tokyo Electron Ltd. (TEL)

Telius 305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2003-11-06

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Software Version Ver6.75-Rev000-VSTD6.75a
System Power Rating200V AC 3-Phase
Loading Configuration3 load ports
Vendor Chm ModelChemicals / Gases Used 
Chm/Unit Position   1SCCMAr ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO
Chm/Unit Position   2SCCMAr ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO
Process Unit:Model:Remark
ChillerDaikin UBRPD5B-2T2
* stopped production
CoolantLower:FC3283, Upper:FC40
Proc Chbr 1,2SCCM Oxide; Y203 Coating
ESC typeESC ASSY,SCCM-OX LES3D87-052854-11
RF Generator TOPAGA-50B2
RF Matcher TOPAMN-50B2
RF Generator BottomWGA-50E
Matching ControllerWMN-50H6(2MHZ/5KW)(PS3)
MFC/Pressure Unit:
Pressure MonitorC/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure MonitorC/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure MonitorB.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure MonitorATM Switch : 41B13DGA2AA040 (MKS)
Pressure MonitorPressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas
FOUP Opener:
Loader ModuleSELME2112ZS22-AD5
Carrier ID ReaderKEYENCE BL-601 HAC1-SO
Gas System:
Final Pressure Switch51A (MKS)
ValvePrimary side(Utility-MFC):Mega mini (FUJIKIN)
ValveSecondary side(MFC-PC):Mega one (FUJIKIN)
Exhuast System:
TMP Back Pressure Monitor51A11TGA2BA003 (MKS)
Final Valve,  HeaterValve; AGD21V-6RM-GWL4 (CKD)
FilterFilter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC10 INCH (250MM)
EMOFront x1, Rear x3
Signal TowerRed/Yellow/Green/ (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Cable Length12m (Interconnection), 16m (Top RF cables),15m(Btm RF cables)
CoolantLower:FC3283, Upper:FC40

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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