Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Dainippon Screen Mfg. Co. (DNS) SS-3000

Asset ID: 67429

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SS-3000

Wafer Scrubber

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Software Version (include revision #)  242A000  
System Power Rating  208 AC 3-Phase for System  
Loading Configuration  4 load port for  one indexer robot  
   Vendor Chm ModelChemicals / Gases Used 
Chm/Unit Position   1  Spin section (backside scrubber unit)0.063%TMAH 
Chm/Unit Position   2  Spin section (backside scrubber unit)0.063%TMAH 
Chm/Unit Position   3  Spin section (backside scrubber unit)0.063%TMAH 
Chm/Unit Position   4  Spin section (backside scrubber unit)0.063%TMAH 
Parent Compnt
Part Description
Detail Description
Mfg Part
Mfg Name
Config Verified Y/N
Base SystemMain System RobotHigh Speed TypeTS-520-D512SKawasaki1
Base SystemIndexer moduleIndexerTS-310-D511SKawasaki1
Base SystemIndexer moduleIndexerXU-ACT153LYASUKAWA1


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