Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Kokusai Quixace Ultimate ALD SiO2

Asset ID: 209043

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Kokusai

Quixace Ultimate ALD SiO2

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 5/2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: 5/1/2022

Section 1. Tool General Information  
Micron MISTI/LID #  KOKU6E5500
Vendor Tool Serial #  T1DC6-01456
Month / Year of Tool Move In (MM/YYYY)  31-May-07
Tool Excess Date (MM/DD/YYYY) 9/17/2021
Tool Current Status In production
Tool working condition before deinstall Working
Tool Location  Cleanroom
Any modification/conversion/refrofit was perform to the tool?  No
    
Section 2. Move-out constraint  
Any layout/move-out path constraint Yes
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information  
OEM  HIKE
Tool Model  QUIXACE1
Process  ALD SiO2
Software Version (include revision #) 22.65.00
System Power Rating  480AC 3-Phase
Loading Configuration  6-Loader


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