Tokyo Electron Ltd. (TEL) ALPHA-303i Nitride

Equipment details:

Date of Manufacture: 2004-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

DIFFUSION 11-3TEL_A303I_NIT_01OX TEL 303I OXYNIT

Tool config is based on original PO, please verify tool details at tool inspection

For TEL Furnace, Pressure Gauge, Exhaust controller, Quartz, Dry pumps and customer provided items not included on tool sales

General Specification

Safety Specification: S2-0200/ CE-Mark(STD)

Heater Model: FTP VOS-56-003 4Zone / RT-1000(C ) /with RCU

Process Condition: LP

Maximum Operating Temperature C: 950

ART Control: N/A

N2 Load Lock: YES

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100

Boat Operation (Handing Position): 2 Boat Type

Software Version (WAVES): Ver 2.13 (WAVES)

Furnace Spec, Furnace

Dewpoint Meter for N2 Load Lock: None

RCU Duct Length FNC - RCU: N/A

Ionizer Maker / Model: ION system / 4052e(controller):4610TF(ionizer)

Chemical Per-filter (for Acid): None

Chemical Per-filter (for Alkali): None

Chemical Per-filter (for Hydrocarbon): None

Side Maintenance: None

O2 Density control for N2 Load Lock: Yes

N2 Boat Shower Wafer Cooling: Yes

Fumace Temperature Controller: Model560A

Furnace Spec, Wafer/Carrier Handling

FOUP Maker / Model: ASYST/GEN3

Carrier Stage Capacity: 16

Info Pad A,B: None

Info Pad C,D: None

Fork Material: 1+4/ AI2O3(STD)

W/T Type: 1+4 Edge Grip

W/T Auto Teaching: No

Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

RCU Duct Connection Point: N/A

Gas Spec, Gas Distribution System

IGS Type: IGS 1.5"W-seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend (STD)

IGS Final Filter: MYKROLIS(Ni)

IGS Regulator: VERIFLO

IGS MFC Maker / Type: AERA

IGS Press. Transducer: NAGANO

Liquid Source Vapor System Maker / Model: None

Auto-Refill System Maker / Model: N/A

Auto-Refill System Provided By: N/A

Refill System Tubing Interconnect By: N/A

Ozone Delivery System Maker / Model: None

Ozone Delivery System Provider: N/A

Extemal Torch Unit: N/A

Water Vapor Generator (WVG): N/A

PAC: None

Gas Spec, Gas Facilities

Incoming Gas Connection Point: Bottom Connection

Gas Vent Connection Point: Bottom Connection

Exhaust Vent Connection Point: Top Connection

Gas Unit Exh. Connection point: Bottom Connection

Process Gas Exhaust connection point: Bottom Connection

Exhaust Specificationbution

Vacuum Gage - Press Ctrl: MYKROLIS

Vacuum Gage - Press Monitor (133kPa): MYKROLIS

Vacuum Gage - Pump Monitor: MYKROLIS

Main Valve: CKD Combination valve

Pump Maker / Model: EDWARDS/IH1800 (30000L/min)

Pump Provided by: Customer

Abatement System Type: Buming Type

Abatement System Maker / Model: OSC 1862WA (thermal wet)

Abatement System Provided by: Customer

N2 Dilution Unit Provided by: Gas cabinet exhaust

Pump Power: Facility provide

Pump Control Unit Steeing Location: 

Pump-FNC Vacuum Piping Provided By: Customer

Reactor Specification

SiC Vendor Requirement: N/A

Liner Tube(AP): N/A

Process Tube(AP,AP+Sub-AP): N/A

Outer/Inner Tube Material (LP): Ouartz / Quartz

Inner Tube Type (LP): Reduce

Inner T/C: Outer Tube interior wall type (for CVD)

Tube Sealing: O-Ring

Manifold Heater: None

Switch Valve for Manifold Cooling Water: The reinforced cooling water is used

Soft Backfill Injector: Yes

Boat Type: 141Slots loader

Boat Material: SiC with CVD-Coat

Boat Rotation: Yes

Pedestal Type: Quartz+SiC

Cap Heater: Yes

Auto Shutter: Shutter Purge Type

Earthquake Countermeasure: N/A

Power Specification, Power dist System

Voltage 3phase: 480VAC

3phase connebtion type: Beaker Terminal

Voltage Single-phase: 120VAC

Single-phase connection type: Beaker Terminal

Frequency: 60Hz

Wattmeter Maler / Model: None

Control Power UPS provided by: Customer

Control Power UPS type: Fab-wide system

UPS Input Voltage / Output Voltage: N/A

Power Cable Input Entrance Location: Power Box Top

Power Specification, Cable Length

Wiring by: Customer

Conduit/Raceways provided by: Customer

Interface Specification, Factory Automation System

Host　Communications: Comply with GJG

Equipment Host I/F Connection: Gas box top (OP)

Ingenio: Yes

OHT Capability: Yes

PIO I/F Location: FNC Top

PIO Provided by: TEL

PIO Maker /Model: Hokuyo / DMS-HB1-Z05

Carrier ID Reader Writer Type: RF

CIDRW Load Port: Read

CIDRW FIMS: Write

CIDRW Maker / Model: OMROM/V700-L21

CIDRW Provided by: TEL

EEC(Equipment Engineening Capability): None

Customized Management Signals(for WAVES): N/A

Interface Specification, User Interface

Signal Tower Model: LOUGWB-24-4

Signal Tower Colors　(from the Top）: Red/Blue/Yellow/Green

Signal Tower Location: Front / operation panel type

Front Operation Panel: Yes

MMI and Gas FlowChart: FPD & GFC installed

Indicator Type: Selete

Operator Switch: Operator Access/White Cover with Orange Light

Pressure Display Unit （Gas Inlet / Vacuum）: MPa / Torr

Cabinet Exhaust Pressure Display Unit: Pa

Waming Label: English

Other Specification, Unit Location

Power Box: Sub-Fab

Pump: Sub-Fab

RCU: Yes

Other Specification, Gas Leak Detector

Gas Leak Detector: Yes

Gas Leak Detector Provided By: TEL

Gas Leak Detector Maker: Riken

Gas Detector Power: Power box

Damage/Missing parts list

Damage parts- PT1 N2 meter (PT1 N2錶頭), PT2 NH3 meter (PT2 NH3錶頭), monitor at backside of tool, system Fan1, Loadport 1 U/D driver

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales