Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Endura II Front-End Metallization
PVD (Physical Vapor Deposition)
Date of Manufacture: 2016
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
PVD - 11-3AMAT_ENDURA2_CO_01 - COBALT
Tool config is based on original PO, please verify tool details at tool inspection
Mainframe
Frame Type: E2 300MM ENDURA
Software Version: CPCI B50140
Load Lock Type: Single wafer load lock
Robot Blade Type: ACB
Transfer Blade Type: ACB
Cryo: CTI, On Board
Cryo Compressor: IS1000
Heat Exchanger: DAIKIN
Chm Position 2: Cobalt, Chemicals / Gases Used: N2,Ar
Chm Position 3: Cobalt, Chemicals / Gases Used: N2,Ar
Chm Position 5: Cobalt, Chemicals / Gases Used: N2,Ar
Chm Position C: PCXT, Chemicals / Gases Used: N2,Ar
Chm Position D: PCXT, Chemicals / Gases Used: N2,Ar
Chamber Position: E, F, Process Type: Dual Mode Degas
Chamber position: A, B, Process Type: Cool
DEGAS chamber
Chamber Position: E, F
Process Type: Dual Mode Degas
Pump, Turbo - Adixen: CTI, On-Board
Cool chamber
Chamber position: A, B
Process Type: Cool
Process Type: Reactive PC
Chamber position: C,D
Shutter option: none
chamber body (Al or SST): Al
chamber body part number: 0040-76718
Slit valve seal (bonded or o-ring): bonded
Slit Valve door part number: 0040-84391
Target vendor: n/a
Target No.: n/a
Bakeout/idle power (%): n/a
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): n/a
AMAT Part number Master: n/a
OEM Part Number Master: n/a
AMAT Part number Slave: n/a
OEM Part Number Slave: n/a
Generator Size : n/a
Total DC (12 kwh,24kwh, etc): n/a
Bias Generator : n/a
AMAT Part number : n/a
OEM Part Number: n/a
Bias Generator Size: n/a
Bias Generator Frequency: 13.56MHz and 2MHz(in one generator)
Rf coil generator: COMDEL CDX-2000
AMAT Part number : 0190-23308
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): n/a
Magnet type: n/a
Magnet part number: n/a
adaptor p/n: n/a
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: Belljar 0040-55456
Treatment (Arc spray/Bead Blast): Al2O3
Treatment roughness (RA): n/a
lower shield p/n: 0040-86514
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
inner(or mid) shield p/n: 0021-19342
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
shield clamp p/n: 0020-19258
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: Insulator 0200-01903
Treatment (Arc spray/Bead Blast): Al2O3
Treatment roughness (RA): n/a
lower shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal type: n/a
pedestal p/n: n/a
Lift fingers p/n: n/a
Lift hoop p/n: n/a
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): n/a
Cryo gate valve (2/3 pos): Pendulum
MFC 1 Gas: He
MFC 1 Cal Factor: 1
MFC 1 Size: 300
MFC 1 Type: He
MFC 1 Part Number: 0010-44160
MFC 2 Gas: Ar2
MFC 2 Cal Factor: 1
MFC 2 Size: 200
MFC 2 Type: Ar
MFC 2 Part Number: 3030-13113
MFC 3 Gas: Ar
MFC 3 Cal Factor: 1
MFC 3 Size: 20
MFC 3 Type: Ar
MFC 3 Part Number: 3030-13116
MFC 4 Gas: (MFC6) H2
MFC 4 Cal Factor: (MFC6) 1
MFC 4 Size: (MFC6) 100
MFC 4 Type: (MFC6) H2
MFC 4 Part Number: (MFC6) 0015-02990
Chamber base pressure (T): 0.0000002
Chamber Rate-of-Rise(nTorr/min): 15000
Press. and ROR at Startup: not necessary
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 34.7
Process N2 Supply Pressure: 33.9
Cryo Regen N2 pressure: na
Vent Ar pressure: 47.7
Optional Gas (He): 30.1
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 95.7
SLIT VALVE CDA: 85
Cooling Water Flow (GPM): 0.8
Process Type: Cobalt
Chamber position: 2,3,5
Shutter option: yes
chamber body (Al or SST): SST
chamber body part number: 0040-98657
Slit valve seal (bonded or o-ring): bonded
Slit Valve door part number: 0040-84391
Target vendor: NIKKO
Target No.: TAG169
Bakeout/idle power (%): n/a
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): MKS
AMAT Part number Master: 0190-23736
OEM Part Number Master: n/a
AMAT Part number Slave: n/a
OEM Part Number Slave: n/a
Generator Size : 10kw
Total DC (12 kwh,24kwh, etc): 10kw
Bias Generator : n/a
AMAT Part number : n/a
OEM Part Number: n/a
Bias Generator Size: n/a
Bias Generator Frequency: n/a
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
DC Coil Power Supply: n/a
AMAT Part Number: n/a
OEM Part Number: n/a
Magnet rotation speed (rpm): 55
Magnet type: ALPS CO
Magnet part number: 0010-51232
"adaptor p/n: 0240-29326 KIT, ADAPTER, ALPS CO,
300MM ENDURA BLUE
adapter:0040-62882"
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: DARK SPACE SHIELD 0021-18068
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
lower shield p/n: 0020-48185
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
inner(or mid) shield p/n: 0040-76737 (Ground ring)
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: 0200-20437
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: 0021-22177
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: 0021-26565
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): n/a
pedestal type: HT-ESC
pedestal p/n: 0010-27430
Lift fingers p/n: 0020-46828
Lift hoop p/n: 0020-75465
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): n/a
Cryo gate valve (2/3 pos): 3 Position
MFC 1 Gas: AR
MFC 1 Cal Factor: n/a
MFC 1 Size: 100
MFC 1 Type: AR
"MFC 1 Part Number: Brooks
(can not see P/N)"
MFC 2 Gas: AR
MFC 2 Cal Factor: n/a
MFC 2 Size: 20
MFC 2 Type: AR
"MFC 2 Part Number: Brooks
0010-42843"
MFC 3 Gas: n/a
MFC 3 Cal Factor: n/a
MFC 3 Size: n/a
MFC 3 Type: n/a
MFC 3 Part Number: n/a
MFC 4 Gas: n/a
MFC 4 Cal Factor: n/a
MFC 4 Size: n/a
MFC 4 Type: n/a
MFC 4 Part Number: n/a
Chamber base pressure (T): 5.00E-8 Torr
Chamber Rate-of-Rise(nTorr/min): 2000nTorr/min
Press. and ROR at Startup: Ch2/3/5:Press:2.20E-08Torr ROR:2xx nT/min
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 32psi
Process N2 Supply Pressure: n/a
Cryo Regen N2 pressure: 78
Vent Ar pressure: n/a
Optional Gas (He): n/a
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 78
SLIT VALVE CDA: 77
Cooling Water Flow (GPM): CH2:8 CH3:10 CH5:11
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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