Zygo Corp. NewView 7300

Equipment details:

Date of Manufacture:

Currently Configured for: 150mm

Current Equipment Status: Available

Location of Equipment: Bend, United States

Available date: Currently Available

Hard copy manuals included.

Measurement

Technique

Non-contact, three-dimensional, scanning white

light interferometry

Scanner Closed-loop piezo-based, with highly linear

capacitive sensors

Objectives 1X, 2X, 2.5X, 2.75X, 5X, 5.5X, 10X, 20X, 50X,

100X; objectives available in standard and long

working distances

Refer to the NewView Objective Chart for

objective specifications

Objective

Mounting

Options

• Single objective dovetail

• Manual 6-position turret

• Motorized 6-position turret

Field Zoom

Lenses

High-quality discrete zoom lenses;

0.5X, 0.75X, 1.0X, 1.5X, 2.0X

Image Zoom Motorized 3-position system zoom

Field of View Objective and zoom dependent; from 0.03 to

14 mm; larger area imaged with field stitching

Illuminator Unique single white-light LED design with

superior life, uniform imaging and high

efficiency

Controls Filter Tray, Aperture Stop, and Field Stop

(Focus-aid)

Measurement

Array

Selectable, standard640x480, 320x240, 160x120;

optional- 1000x1000 (1K camera)

Part Viewing Integrated on Primary Display

Focus Motorized manual and auto focus

Z-Drive

(Focus) Stage

DC brushless microstepper motor with ballscrew

drive, 100 mm range, and 0.1 µm resolution

Part Stage

Options

• Manual Tip/Tilt/X/Y with ±6° tip/tilt,

±50 mm x/y

• Motorized Tip/Tilt/X/Y with ±4° tip/tilt,

±75 mm x/y

• Motorized Tip/Tilt/X-Theta (or Y-Theta) with

±4° tip/tilt, ±75 mm linear travel

Computer High-performance Dell PC w/ 1080P HD display

Software ZYGO MetroPro software running under

Microsoft Windows 7 (64-bit)