Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Applied Materials (AMAT) Vantage RadOx

Asset ID: 33973

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Applied Materials (AMAT)

Vantage RadOx

Platform RTP Equipment

Rapid Thermal Processing (RTP) Equipment

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool Model : VANTAGE

Process : RADOX


Section 1. Tool General Information
Micron MISTI #VANTAJ7500
Vendor Tool Serial # 
Date of Tool Move-In2010
Tool Availability Date 
Tool Current StatusIn production / De-installed 
Tool working conditionWorking / Not working with missing parts / Not working (Pls strike-off accordingly)
Tool LocationBHS warehouse
  
  
Section 2. Tool Specific Information
OEMapplied materials
Tool ModelVANTAGE
ProcessISSG_Met
Software VersionVG3B5.6_129
System Power Rating 208V AC 3-phase
Loading Configurationsingle wafer loading
Any equipment manuals available?  Yes / No 
Tool under OEM service contract?   Yes / No


 DescriptionChemicals / Gases Used
Chm Position   1RadianceH2 O2 N2 He 
Chm Position   2RadianceH2 O2 N2 He 
Chm Position   3__________________________________________________
Chm Position   4__________________________________________________
Chm Position _____________________________________________________
Chm Position _____________________________________________________
Chm Position _____________________________________________________
    
System Configuration   
Description   
Tool:   
RTP Chamber TypeRADIANCE 300MM  
Technology OptionOPEN LOOP TUNER  
MFC TypeSTEC  
Core Anneal and RTOYES  
BPSG AnnealNOT APPLICABLE  
Rotation TypeWRLD TOXIC  
Low Flow O25 SLM  
High Flow O250 SLM  
Oxygen AnalyzerYES  
H2HIGH AND LOW FLOW  
Gas Pallet TypeTOXIC RP COMMON GAS PALLET 
Chamber Integration LinesSTANDARD  
RP Pump cable81 Feet  
Base RingLOWER CH MODULE, CHEM, TIGHT TOLERANCE BASE RING
Line 1N2 (N/O), 50 SLM  
Line 2O2, 50 SLM  
Line 3O2, 5 SLM  
Line 7H2, 20 SLM  
Line 8H2, 2 SLM  
Line 10N2 (P/P), 30 SLM Restrictor  
Line 11He, 30 SLM  
Line 12N2 (BP), 50 SLM  
Line 13N2 (Maglev), 100 SLM  
Process Chamber PumpBOC Edwards iH1000  
TransformerYES  


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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