Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Ebara FREX300S2

Asset ID: 13126

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Ebara

FREX300S2

Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture: Jun 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: Currently Available

  1. Main System: F-REX300S2
    1. F-REX300S2 Details
      1. Polishing Unit
        1. Turn Table x4, Top Ring x4(GX 8-Area), Scan Dresser x4, Atomizer x4,
        2. Liner Transportor x2, Turn Over x2, STP x1, System Controller,
        3. Slurry Scan Nozzle x4, Wafer Slip-Out Sensor x4, Operation Panel x2
      2. Cleaner Unit
        1. 1st:R/R w/Megasonic Jet, 2nd:R/R, 3rd:2FJ, 4th:IPA/SRD
      3. EFEM Unit
        1. Dry Robot x1, Loadport x4, Operation Panel x2, ITM NOVA Ready at Left Side
      4. M14 Common Spec & FA Spec Requirement
      5. M14 Hardware Requirement & Improvement Items (Slurry Nozzle Motor Type, Auto Calibration)
  2. Standard Options
    1. Spare GX Carrier
    2. Anti-Static Material for Wafer Exposed Surface
    3. Eddy Current End Point Monitor (R-ECM1D) for 2 Table-A&C
    4. ME-30 x2 for S-OPM & TCM EPD Controller
    5. Malema Slurry Flow Controller for 3 Line/Table
    6. Light Curtain for EFEM
    7. Equipment Monitor Function(Camera)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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