Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 1997
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Hsinchu, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
Configuration :
Install Type is Stand Alone.
Last PM date is FEB 2020.
Off-Line date is FEB 2020.
All cables are present.
Handler Type is auto loader.
Robot Type is EQUIP.
End-Effecter Type is standard.
Pre-Aligner is including.
System SW(OS) version is WINDOWS NT.
System SW(APP) version is 825-10494-472-E7.
No SW Options.
SEMI Std Options is E84.
The supporting equipment include the AC Dist Box.
The chuck is ESC type.
The equipment include DSQ chamber.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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