Tokyo Electron Ltd. (TEL) Triase+ Ti/TiN

Equipment details:

Date of Manufacture: Mar 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

1. Main System

1-1. TRIAS e+ Platform

- Load Port*3 (12" wafer)

- Loader Module

- Lord Lock Module with Cooling*3

- Power Distribution Unit

- Trias Software

- PF S2-0200 Safety

1-2. Ti Process Module(2 Sets)

- PCOT Ti Chamber

- Gas Box

- RF Generation Unit

- Milaebo Trap Interface

- Milaebo Trap Software

1-3. TiN Process Module(2 Sets)

- PCOT TiN Chamber

- Gas Box

- Korea Trap Interface

- Korea Trap Software

1. Accessory Parts

2-1. PF Accessory

Load Port

UI Fixing at LM Right Side

EFEM & FAN Check Monitor

TM, LLM Leak Check Port Manual Valve Transfer Navigation System

PF Outer Cable

Edge Grip Blade

LM Fluorescent Light

TM RGA PORT (w/o Manual Valve)

2-2. Ti PM Accessory(2 sets)

Ti Leak Check Port

Ti PM Outer Cable

Ti Gas Box ClF3, H2, NH3 LINE

2-3. TiN PM Accessory(2 sets)

TiN Leak Check Port

TiN High Coverage Process Kit

TiN PM Outer Cable

2-4. Utility Accessory

Utility Interconnection Gas Female

FDC

Signal Tower

CVCF Correspondence

Rear Step

Cable Tray

2-5. Safety

PF, PM S2-0200

Korean & English Safety Label for PF and PM

2-6. Software & AGV

Standard GEM,GJG

On Line

OHT&AGV I/O Monitor Correspondence Omron Carrier ID Reader Correspondence Wafer Log

Wafer ID, PPID, PRJOBID

1. HP-Ti Kit for Ti Module
2. SFD Kit For TiN Module
3. Korea Trap