Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Tokyo Electron Ltd. (TEL) Triase+ Ti/TiN

Asset ID: 11051

Print spec sheet

Tokyo Electron Ltd. (TEL)

Triase+ Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: Mar 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

1. Main System

1-1. TRIAS e+ Platform

- Load Port*3 (12" wafer)

- Loader Module

- Lord Lock Module with Cooling*3

- Power Distribution Unit

- Trias Software

- PF S2-0200 Safety

1-2. Ti Process Module(2 Sets)

- PCOT Ti Chamber

- Gas Box

- RF Generation Unit

- Milaebo Trap Interface

- Milaebo Trap Software

1-3. TiN Process Module(2 Sets)

- PCOT TiN Chamber

- Gas Box

- Korea Trap Interface

- Korea Trap Software

  1. Accessory Parts

2-1. PF Accessory

Load Port

UI Fixing at LM Right Side

EFEM & FAN Check Monitor

TM, LLM Leak Check Port Manual Valve Transfer Navigation System

PF Outer Cable

Edge Grip Blade

LM Fluorescent Light

TM RGA PORT (w/o Manual Valve)

2-2. Ti PM Accessory(2 sets)

Ti Leak Check Port

Ti PM Outer Cable

Ti Gas Box ClF3, H2, NH3 LINE

2-3. TiN PM Accessory(2 sets)

TiN Leak Check Port

TiN High Coverage Process Kit

TiN PM Outer Cable

2-4. Utility Accessory

Utility Interconnection Gas Female


Signal Tower

CVCF Correspondence

Rear Step

Cable Tray

2-5. Safety

PF, PM S2-0200

Korean & English Safety Label for PF and PM

2-6. Software & AGV

Standard GEM,GJG

On Line

OHT&AGV I/O Monitor Correspondence Omron Carrier ID Reader Correspondence Wafer Log


  1. HP-Ti Kit for Ti Module
  2. SFD Kit For TiN Module
  3. Korea Trap

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.