Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (Boise)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Boise, United States
Available date: Currently Available
Tool Status: Pump has been shut down, disconnected, and moved to the warehouse.
Configuration. Audit to verify.
Pump has not been refurbished and is not skidded or crated.
Technical Specifications：
Peak pumping speed 50Hz : 19200 l/min
Peak pumping speed 60Hz : 21667 l/min
Ultimate pressure Max (No Purge) 50Hz : 1.5x10-3 torr
Ultimate pressure Max (No Purge) 60Hz : 6.7x10-4 torr
Ultimate pressure Max (50 SLM Purge) 50Hz : 6.7x10-3 torr
Ultimate pressure Max (50 SLM Purge) 60Hz : 4.5x10-3 torr
Motor rating : 6.5 kw
Max continue inlet flow : 100 SLM
N2 purge flow : 15 – 120 SLM
Cooling water : 1.3 l/min
Inlet connection : DN100
Outlet connection : DN40
Dimensions : L988 x W390 x H986 mm
Max sound level : < 69 dBA
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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