Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2008-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 9/1/2025
Tool is exposed to Copper Process.
Tool config is based on original PO, please verify tool details at tool inspection
OEM: TEL
Tool Model: TeliusSP-SCCM
Software Version (include revision #): Ver6.75-Rev000
System Power Rating: 200 AC 3-Phase
Loading Configuration: 4 load port
Chamber Name 1: Process ship 1
Chamber Name 2: Process ship 2
Chamber Name 3: Process ship 3
Chamber Name 4: Loder Module
Chamber 1 Description: SCCM
Chamber 2 Description: SCCM
Chamber 3 Description: SCCM
Chamber 4 Description: Telius LM
Chamber 1 Chemicals Gases Used: N2,Ar,C4F6,C4F8,O2,CF4,CHF3,CH2F2,CO
Chamber 2 Chemicals Gases Used: N2,Ar,C4F6,C4F8,O2,CF4,CHF3,CH2F2,CO
Chamber 3 Chemicals Gases Used: N2,Ar,C4F6,C4F8,O2,CF4,CHF3,CH2F2,CO
Optional Gas 1: Ar
Optional Gas 2: C4F6
Optional Gas 3: C4F8
Optional Gas 4: CAP
Optional Gas 5: CAP
Optional Gas 6: CAP
Optional Gas 7: O2
Optional Gas 8: O2
Optional Gas 9: CF4
Optional Gas 10: CHF3
Optional Gas 11: CH2F2
Optional Gas 12: CO
Optional Gas 13: CAP
Optional Gas 14: C4F8
Optional Gas 15: CAP
Optional Gas 16: O2
Custom Gas Lines 1: 1420.5sccm
Custom Gas Lines 2: 50.3sccm
Custom Gas Lines 3: 43sccm
Custom Gas Lines 7: 60.8sccm
Custom Gas Lines 8: 561.1sccm
Custom Gas Lines 9: 145.9sccm
Custom Gas Lines 10: 100.4sccm
Custom Gas Lines 11: 57.7sccm
Custom Gas Lines 12: 500sccm
Custom Gas Lines 14: 13.7sccm
Custom Gas Lines 16: 18.7sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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