Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Model No. 2300
FI SN: 1017439-10-25-0672
Model No. 2300 EXELAN/ 2300 EXELAN FLEX
Ch1 SN: 23EX-2516(F128233-PM1)
Ch2 SN: 23EX-2517(F128233-PM2)
Ch3 SN: 23EX-2518(F128233-PM3)
Ch4 SN: 23EX-2519(F128233-PM4)
Process: CUOX
Software Version: 1.8.4 SP8-HF4
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 Load ports
Chm/Unit Position 1: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2
Chm/Unit Position 2: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2
Chm/Unit Position 3: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2
Chm/Unit Position 4: Exelan; Chemicals / Gases Used: C4F8, C4F6, CHF3, CF4, O2, CH2F2, He/O2, H2, Ar, N2
Standard Specs
Software Revision: 1.8.4-SP11-HF5
Factory Automation: OHT PIO Sensor
AMHS: AMHS - OHT or manual deliver - Factory Interface
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 3 carrier stage (Continuous flow operation)
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Interface A: Hardware related to EDA Note: This is a cost option.
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Platform Type: Version 2
UPS on system: Yes
Earth Leakage Breaker: Yes (for Fab 3 only)
Gas Box: Transport Module, GIB for 16 lines IGS GBX
Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)
Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
EMO: Front x2, Rear x6
Conditioning Station: No
Foreline: Not Heated
Sub-panel: Dual Drop Sub-panel Remote Power Distribution Box (RPDB)
Interconnect Cables: TM to sub-panel, 50 ft
Pump to TCU: 50 ft
TCU to PM: 50 ft
PM to Pump Interconnect: 50 ft
Inter Lock: Gas Box Door (I/L Signal is sent to the Factory)
Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed)
Support Remote Units
Chiller Lower: CTC YR-8020
Coolant: HT-110
Chiller Hose: 5/8 ID Braided Stainless Flex
RF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )
RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )
RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC
Wafer ID Reader: No WIDS Bottom Read
Carrier ID Reader: Asyst RF Advantag
EIM Server: EIM Server-One EIM server per 8 frames
Hardware Config
Process Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)
25 Wafer Input Buffer Station: VTM 25 Slot Buffer-Lwr Align
25 Wafer Input Buffer Station: VTM 25 Slot Buffer-Lwr Aux
Endpoint type: Optical Emission Spectroscopy
ESC type: Dual Zone/Flex Bipolar
Gap: 2.34 cm
TMP: TMP-Edwards 1603
Dry Pump: Ebara -AA100
Transfer Module Backing Pump: EPX with N2 Gas Module
Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr
Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr
Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr
Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001
Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14
Upper Electrode: Heated Constant Temperature Control
Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode
O-Rings: FluoroSilicone
Chamber Isolation Valve: Barrier Seal Door
Wafer Lift Mechanism: 2-stage lifter
Gas Position
Gas line 1: C4F8 50 sccm-HORIBA SEC_Z300
Gas line 2: C4F6 100 sccm- HORIBA SEC_Z300
Gas line 3: CHF3 150 sccm- HORIBA SEC_Z300
Gas line 4: CF4 300 sccm-HORIBA SEC_Z300
Gas line 5: CF4 1000 sccm- HORIBA SEC_Z300
Gas line 6: O2 200 sccm- HORIBA SEC_Z300
Gas line 7: CH2F2 100 sccm- HORIBA SEC_Z300
Gas line 8: 30%O2/He 100 sccm-HORIBA SEC_Z300
Gas line 9: H2 500 sccm- HORIBA SEC_Z300
Gas line 10: Ar 1000 sccm- HORIBA SEC_Z300
Gas line 11: N2 1500 sccm-HORIBA SEC_Z300
Gas line 12: O2 3000 sccm- HORIBA SEC_Z300
Gas line 13: NA
Gas line 14: NA
Gas line 15: NA
Gas line 16: NA
Gas Box Config
Purge: N2 (Process Grade N2) (Customer Supplied)
Filter: Final gas : Mykrolis (P/N WG2FT1RR2)
Gas Box Inlet Option: Regulated Inlet Gas Panel
Non-standard PM/GB Feature: Stone Henge Gas Box / with GIB Option 16 lines single contained Hasteloy lines.
Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout
Regulator: SQMICRO (VERIFLO)
Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)
Final Pressure Switch: Absolute Pressure switch 400 torr Lam P/N 796-002833-003
Critical Parts
Upper Outer Electrode: ASSY,ELCTD,OUTER,.18 STEP,300M
Upper Inner Electrode: ASSY,ELCTD,INNER,TC,300MM
Upper Quartz Ring: Ring, QTZ,COVER BKG PL,UPR ELCT
Q-Pad Kit: inner UE shim ( 857-072806-005) & outer UE shim (713-072792-003) ,TCP上的shim(857-073299-001+714-069935-003)
Al Backing Plate: TALON ALUMINUM BACKING PLATE
Gas Feed Ring: Ring, Ptn, Gas Feed, Dual Zone
Dual Zone ESC: ESC,IBP,DZ,FLAT,2-SNSR,FLEX
CERAMIC COUPLING RING: RING,COUPLING,CERAMIC,W/FLAT,300MM
Edge Ring Cover (In): COV,H/E RING,QTZ
Focus Cover Ring: B,FOCUS R CVR,DFC 300MM
Silicon hot edge ring: RING,HE,4XX ESC,W/FLAT,300MM
Edge Ring Cover (Out): RING,COVER,OUTER,GND
Landing pad: PED,LNDNG.CONF R,PEEK,F60FLEX
Ground Shield: SHLD,GND,300MM,2300
Liner: LINER/SPCR,EXT GND RING,2.350C
OPCR ( One Piece Confinment Ring ): RING,WAP,17.07X2.155THK,300MM
Peek Sleeve: SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK
Spares: Clean kit (2), and Pendulum Valve Clean Kit(2)
Fixtures, Jigs.: Provide necessary fixtures and/or jigs including: ladder for MFC change (1 per every 5 tools) turbo pump jack (2 pcs in total)
TEF gasket: GSKT,OUTER,GAS FEED,DUAL ZONE
TGV assembly: GTV,CONT,200MM FLG,SER 65
partition ring: RING,PTN,GAS FEED, DUAL ZONE
Lift Pin: ASSY,BLWS,WAFER LIFT
ESC Power Supply Board: ASSY,PCB,PWR SPLY,ESC,BI
DC Power Supply: ASSY,ENCL,DC CONT
2-stage lifter: AIR CYL,2-STG, 7+12.5MM, HIGH T
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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