Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2003
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Base System
Reflexion: 4 head, 3 platen polishing system. Dry in Dry out.
Polisher Skins: Clear P1, P2, P3, and P4: Non-4910 compliant.
Gap Wash: 120 degree nozzles(Fan type)
Load Cup Wafer Exchanger: Machined SST rings
Nova 3090 Ready: None
Monitor 1 Location: Cart
Monitor 2 Location: None
Light Tower: Factory Interface and Polisher Sides
Software
LK Software: Reflexion VMIC rp3B6.5_31
Factory Interface: fB4.20_14 beta
ISRM / RTPC: N/A
RTPC: N/A
Interface "A": N/A
Nova 3090: N/A
Wafer to Wafer iAPC: N/A
Within Wafer iAPC: N/A
Factory Interface
FI/wet robot: Kawasaki
WIP Delivery Type: OHT/manual delivery
FOUP: N/A
OHT Light Curtain: NA
E84 PI O Sensors and Cables: UPPER E84 SENSORS & CABLES
E99 Carrier ID: N/A
Docked E99 Reading Capability: N/A
Docking Flange Shield: N/A
Frame Configuration: N/A
Load Ports: TDK TAS300
Load Port Operator Interface: STANDARD
Load Port Types: ENHANCED 25 WAFER FOUP
Operator Access Switch: Yes
Platen 1
Platen Type: STANDARD (<= 200 RPM)
Endpoint: N/A
Endpoint: N/A
High Pressure Rinse Flow Meter: 0-5 L/min
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water
Platen 2
Platen Type: STANDARD (<= 200 RPM)
Endpoint: N/A
Endpoint: N/A
High Pressure Rinse Flow Meter: 0-5 L/min
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water
Platen 3
Platen Type: STANDARD (<= 200 RPM)
Endpoint: NA
Endpoint: N/A
High Pressure Rinse Flow Meter: 0-5 L/min
Rinse Arms: High Pressure/Flow
Flow Meter: 50-500 ml/min
Temperature Control: Platen Cooling Water
Polisher
Polisher Technology: SLURRY AND PAD
Polishing Head: 5-Zone Contour CIP
Cross Break: N/A
Pad Wafer Loss Sensor: DARK PAD SENSOR
InterPlaten Clean: NO
ISRM Laser Key Switch: Yes
Slurry Delivery System: 2 x 6 CLC SDS
Head 1 Power Cable: 0150-16277
Head 2 Power Cable: 0150-16278
Head 3 Power Cable: 0150-16279
Head 4 Power Cable: 0150-16280
Head 1 Encoder Cable: 0150-16281
Head 2 Encoder Cable: 0150-16282
Head 3 Encoder Cable: 0150-16283
Head 4 Encoder Cable: 0150-16284
G4+ UPA: MKS
G4+ UPA: MKS
Cleaner Meg
MEGASONICS: One chem direct feed (FM)
Transducer: Yes
Chemical 1: 1000 ml/min
Chemical 2: N/A
Brush Box 1
Brush LDM Type: One chem direct feed (FM)
Chemical 1: 1000 ml/min
Chemical 2: N/A
Brush Box Level Spacer: N/A
Brush Box Shaft: N/A
Toe In: N/A
Slow drain: N/A
Brush Box 2
Brush LDM Type: One chem direct feed (FM)
Chemical 1: 1000 ml/min
Chemical 2: N/A
Brush Box Level Spacer: N/A
Brush Box Shaft: NA
Toe In: N/A
Slow drain: N/A
Dryer Module
Dryer Type: SRD
Recovery Module: SRD
Output Station Dampner: SRD
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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