Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Please verify tool details at tool inspection
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Customer provided items not included on sales
UF3000EX Standard Feature
Overall Accuracy Within 2 µm
X,Y Stage Accuracy：±1.0µm
Stage Durability：200kgf
Wafer Size 8", 12"
X/Y axis Probing Area ±170 mm (X/Y axis Probing Area)
X/Y axis Maximum Speed X axis 300 mm/s Y axis 230 mm/s
Z axis Full Stroke 37 mm
Z axis Maximum Speed 30 mm/s
θ axis Rotation Range ±5 deg.
Fine Alignment CCD ITV Image Processing
Loader Cassette Mounts 1 (2nd cassette with option)
Loader Wafer Handling Robot Arm / Backside Holding
Hard Disk 3.5" 20GB (1 unit standard)
Floppy Disk 3.5" 2HD / 2DD (1 unit standard)
MO 230 / 540MB (1 unit standard)
Display 12.1" TFT Color LCD
Chiller：SCU-600
Temp. Range：-40 to 150℃
Power Consumption Less than 2kVA
Air Supply Source Pressure 0.6 MPa or more
Air Supply Consumption Approximately 0.1 liters / wafer
Vacuum Supply Less than -80 kPa, 30 liters / minute
Dimensions 1508W × 1587D × 987 H mm
Weight 1500 kg (Standard)
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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