Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
Original PO Configuration. Audit to verify.
General Specification:
Safety Specification: SEMI S2-0703
Heater Model: Mid-Temp. VCM-50-012L
Compatible with Atmoshpheric Process: None
Maximum Operating Temperature (C): 300
ART Control: Yes
N2 Load Lock: Yes
Wafer Type: 300mm-Si SEMI STD-Notch
Qty. of Production Wafers: 50
Software Version (WAVES): Ver.2.12 R008
Seismic Isolation Configuration: None
Furnace Spec, Furnace:
Dewpoint Meter for N2 LL: None
Loading Area Light: White (LED)
RCU Duct Length FNC - RCU: 20m
Ionizer (maker/model): None
Chemical PreFilter-Acid: None
Chemical PreFilter-Alkali: None
Chemical PreFilter-Hydrocarbon: Yes
Chemical PreFilter-Location: FNC Top
Side Maintenance: None
Furnace Spec, Wafer/Carrier Handling
Carrier Type: FOUP/25slots, SEMI STD
FOUP Maker/Model: Entegris / A300
Carrier Stage Capacity: 10
Info Pad A,B: Pin
Info Pad C,D: Pin
Fork Material: Al2O3
Furnace Spec, Furnace Facilities
Furnace Exhaust Connection Point: Top Connection
Cooling Water Connection Point: Bottom Connection
Electric Fan Exhaust Facility Connection: Not Installed
Air Intake Point: Top
Gas Spec, Gas Distribution System
IGS Type: IGS 1.125"W-Seal rail-mount
IGS Maker: Fujikin
Tubing Bends: Bend (Less than 90deg)
IGS Final Filter: PALL
IGS Regulator: CKD
IGS MFC (Maker/Type): HORIBA STEC / Digital
IGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111
IGS Press. Transducer: Nagano
"Liquid Source Vapor System Maker / Model: For TMA HORIBA STEC / LSC-F530
For ZAC HORIBA STEC / TL-2014"
Auto-Refill System- TMA: Air Lequide / CANDI
Auto Refill System- ZAC: Air Lequide / CANDI
Auto Refill System Provider: Provided by customer
Refill System Tubing interconn: Provided by customer
Refill System Tubing interconn: Provided by customer
Ozone Delivery System: OP-500H-RE1
Ozone Delivery System Provider: Provided by customer
Water Vapor Generator (WVG): None
Injector O-ring material: DU353
Gas Spec, Gas Facilities
Incoming Gas Connection Point: Bottom Connection
Gas VENT Connection Point: Bottom Connection
Exhaust VENT Connection Point: Bottom Connection
Gas Unit Exh Connection Point: Bottom Connection
Exhaust Specification
Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer
Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer
Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer
"Main Valve: CKD / Valve: VEC-VH8-X0110
Controller: VYX-0279-CONT"
Pump Maker/Model: EDWARDS / iXH1820
Pump Provided by: Provided by customer
Abatement System Type: Burning Type
Abatement System (Maker/Model): EDWARDS /TPU（Zenith)
Abatement System Provider: Customer
N2 Dilution Unit Provided by: No NDU
Pump Power: Customer's Facility Provided
Pump Control Unit Setting Location: None
Pump-FNC Vacuum Piping Provide: Customer
Exhaust Pressure Control (AP): N/A
Exhaust Pressure Controller (AP) Maker / Model: N/A
Exhaust Box: Wide Type (1200mmW)
Heating construction for Facility Exhaust: Between Pump and Abatement System
Heating construction for Facility Exhaust provided by: Customer
Exhaust O-ring material: DU353
Power Specification, Power dist System
Voltage 3phase: 400VAC ＆ 200VAC(for Ozonizer)
3phase connection type: Star Connection
Voltage Single-phase: None
Single-phase connection type: N/A
Frequency: 60Hz
Wattmeter: None
Control Power UPS provided by: None
Control Power UPS type: N/A
UPS Input/Output Voltage: N/A
Power Specification, Cable Length
Power Cable Input Entrance Loc: Power Box Top
Other power requirement: None
FNC - Power Box: 30m
FNC - RCU: 30m
Power Box - RCU: 30m
Power Box - Pump Unit: 30m
Power Box - Refill System: 30m
Power Box - WVG CTRL Unit (if used): N/A
Power Box - Abatement System (if used): N/A
Gas Detector Box - FNC (if used): N/A
Gas Detector Box - Power Box (if used): N/A
Option Box - FNC (if used): N/A
Option Box - Power Box (if used): N/A
Interface Specification, Factory Automation System
Host Communications: Comply with GJG
Equipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)
Ingenio: Yes
OHT Capability: Yes
AGV Capability: None
RGV Capability: None
PGV Capability: None
Load Port Operation: Lower + Upper
PIO I/F Location: FNC Top
PIO Provided by: TEL
PIO Maker/Model: Hokuyo / DMS-HB1-Z
Carrier ID Reader Writer Type: RF
CIDRW Lower L/P: Read
CIDRW Upper L/P: Read
CIDRW FIMS: Read/Write
CIDRW Maker/Model: HOKUYO DMS-HB1-Z series
CIDRW Provided by: Customer
CIDRW Tag Orientation: Vertical
EEC (Equipment Engineering Cap: None
Customized Management Signals: PT/Water
Interface Specification, User Interface
Signal Tower Model: LCE Series
Signal Tower Colors: Red / Blue / Yellow / Green
Signal Tower Location: Front for 10 Stocker (Left)
Front Operation Panel: Yes
MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed
Light Curtain: None
Indicator Type: HOKUYO DMS-HB1-Z series
Operator Switch: Operator Access / White Cover with Orange Light
Pressure Display Unit: MPa / Torr
Cabinet Exh Pressure Display: Pa
Warning Label: Chinese/English
Special Label: None
Damage/Missing parts list
None reported, please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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