Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) ALPHA-303i Oxide

Asset ID: 208428

Print spec sheet

Tokyo Electron Ltd. (TEL)

ALPHA-303i Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: July, 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 10/1/2021

DIFFUSION 15-3TEL_A303I_HT TEL AA300


Tool has been powered off.

One damaged Heater (Hi-Temp. VMU-54-001, 5zone / 850-1200).

Missing heater core and main display.

Quartz is never included.

Missing or damaged parts List.


A Hard Disk Drive is not included.

Other missing or damaged parts:

SiC Pin2105-420648-11Missing
Quartz Pedestal Base2105-220747-91Missing
Qaurtz Base Support1105-302152-91Missing
SiC Fin(A)1105-302146-91Missing
SiC Fin(B)1105-302147-91Missing
Quartz Fins1105-302151-91Missing
Quartz Cap1105-302489-91Missing
Qaurtz Base Support1105-302153-91Missing
Qauartz Cap1105-302158-91Missing
Quartz Sleeve1105-401432-91Missing
Quartz Positioning Pin1105-401429-91Missing



Tube Material:Quartz

Boat Material:SIC

Production wafes:100

Process Gas:Ar(F.S:30slm),O2(F.S:30slm),N2(F.S:30slm),DCE(F.S:1slm)

Water generating Type:External Torch

MFC Maker:HITACHI-Metals

MFC Model:FC-D98series

Process Temp:700-1100deg

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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