Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.
Other missing or damaged parts: Not reported.
No pictures provided: Please inspect to collect photos.
DIFFUSION - 15-3TEL_FOR_LPSIN_G - FORMULA -
Tube Material:Quartz
Boat Material:Quartz
Production wafes:50
Pressure control:APC Valve
Process Gas:DCS(F.S:200sccm),NH3(F.S:2slm),HCD(F.S:100sccm),HF(F.S:5slm),20%F2/N2(F.S:20slm),N2
Vaporizer Maker:HITACHI-Metals(HCD)
Vaporizer TYPE:AS-100(HCD)
MFC Maker:HITACHI-Metals
MFC Model:D980series
Process Temp:600-700deg
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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