Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) TELINDY Plus ALD

Asset ID: 190053

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Tokyo Electron Ltd. (TEL)

TELINDY Plus ALD

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: May, 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available



Tube Material: Quartz

Boat Material: Quartz

Production wafers: 100

Pressure control: APC Valve 

Process Gas: NxTi(AMPLE system), TMA(F.S:500sccm), O3(F.S:20slm,200g/m3), N2,OCTANE

Vaporizer Maker: STEC(TMA,NXTi)

Vaporizer TYPE: LSC-F530(TMA)

MFC Maker: STEC

MFC Model: Z500series

Process Temp: 200-300 deg

.

Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.

Fab15’s shipping kits have been installed on an EXH Box and a 2nd GAS Box of the tool. The Fab15 shipping kits are required to return to Fab15.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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